1[1]Pavesi L,Lockwood D J. Silicon photonics topics. Appl Phys,2004,94:361 被引量：1
2[2]Yang Lin, Liu Yuliang,Cheng Yi,et al. Multimode-interference-type thermo-optic variable optical attenuator with a response frequency of 10kHz. Opt Eng Lett,2003,42(3):606 被引量：1
3[3]Cocorullo G,Rendina I. Thermo-optical modulator at 1.5μmin silicon etalon. Electron Lett,1992,28(1) :83 被引量：1
4[4]Juan W H,Pang S W. Controlling sidewall smoothness for micromachined Si mirrors and lenses. J Vac Sci Technol B, 1996,14(6):4080 被引量：1
