摘要
提出了一种基于多光纤传感器数据融合测量表面粗糙度、平面度和平行度等误差的方法。研制了其测量实现系统;论述了光纤传感器测量表面粗糙度、平面度和平行度等误差的测量原理,以及其光电探测电路的设计;经实验表明该表面误差测量方法具有多误差同时快速测量的优点,为表面误差参数测量提供了新的思路和方法。
A surface errors (surface roughness, flatness and parallelism) measuring method that employs multiple fiber-optic sensors with data fusion is proposed, and a measurement system based on the method is developed. The measure principle of surface roughness、flatness and parallelism errors is described. The design of the circuit of optic-electronic detection is presented. The related measuring experiment shows that this surface errors measurement method has a advantage of simultaneous and fast measurement of multiple surface errors and provides a new approach for measuring surface errors.
出处
《传感技术学报》
CAS
CSCD
北大核心
2005年第2期367-370,417,共5页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金资助项目(50105020)
关键词
光纤传感器
表面误差
光电探测
数据融合
Fiber-optic sensor
Surface errors
Optic-electronic detection
Data fusion
