摘要
本文采用透射电镜（ＴＥＭ），光电子能谱（ＸＰＳ）等手段，对溶液沉淀法和低温等离子体法制备的ＳｎＯ２超微粉的微结构进行了分析比较．通过计算得到了它们的表面氧吸附活化能值，说明不同的制备方法对粉料的活性有很大影响，从而影响用这种粉料制备的气敏元件的气敏特性．
TEM. XPS analyses are used to compare the differences of microstructures of the SnO2nanometer powder prepared by different methods:'precipitation from solution' and 'low temperatureplasma extend CVD'. Surface oxide adsorption energy daal are calculated. These results confirm theconclution that different preparations of the SnO2 nanometer powder affect itS adsorption activities.There fore, the gas sensor elements fabricated by these two nanometer powders apparently vary intheir gas sensitivities.
基金
国家自然科学基金
关键词
气敏特性
氧化锡
超微粉
微结构
precipitation, PECVD, surface adsorption energy, gas sensitivity.
