摘要
在多层介质薄膜中,节瘤缺陷是影响薄膜激光损伤的关键因素。为了理解节瘤缺陷对薄膜激光损伤的影响,以热传导理论为依据,通过有限元方法模拟了多层介质薄膜中的节瘤缺陷在激光辐照下的热力响应,分析了节瘤缺陷的大小和深度对热力响应的灵敏度。发现大而浅的节瘤缺陷有较高的热力响应灵敏度,因此,消除直径较大的膜层表面附近的缺陷有助于提高薄膜抗激光损伤的能力。
Nodule defects on dielectric multi-layer optical thin film are key factors resulting in laser-induced damage. In order to understand the influence of nodule defects on laser-induced damage of optical thin film, the thermal-stress response of nodule defects on multi-layer optical thin film illuminated by laser is simulated based on heat conduction theory and finite element analysis. The sensitivity of nodule defect size and depth to thermal-stress response is analyzed. It is discovered that large and shallow nodule defects have higher thermal-stress response sensitivity. As a result, the elimination of defects with larger diameters near surface layer helps to improve the anti-damage capability of optical thin film.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2005年第4期16-18,23,共4页
Opto-Electronic Engineering
关键词
多层介质薄膜
激光损伤
热应力
有限元分析
节瘤缺陷
Dielectric multi-layer optical thin films
Laser-induced damage
Thermal-stress
Finite element analysis
Nodule defects
