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电化学腐蚀法制备的SiO_2包裹纳米硅颗粒结构的电致发光特性

Electroluminescence Property of Si-Nanocrystallites Embedded-in-SiO_2-Matrix Framework Prepared by Electrochemically Etching 
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摘要 将采用传统电化学腐蚀法制备的多孔硅样品,用浸泡液浸泡剥离其表层多孔层,使样品表面形成 SiO2 包裹纳米硅颗粒的结构,在表面镀半透明Au膜后制备成电致发光器件.在正向偏压下样品可以长时间稳定地发出绿光(510nm),并且随着偏压的升高,发光强度增强,峰位不变.讨论了可能的发光机制. The Si nanocrystallites embedded in SiO 2 matrix framework is formed in the surface of the traditional electrochemically produced samples after being peeled off the surface porous film in the marinade.A semitransparent gold film is evaporated on the surface of the sample to form EL device.A stable green EL can be obtained from the samples,and it gets stronger along with the applied voltage,but the EL peak position does not change.The EL mechanism is discussed.
机构地区 苏州大学物理系
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第3期524-527,共4页 半导体学报(英文版)
基金 江苏省高校自然基金资助项目(批准号:Q2108104)~~
关键词 多孔层 电致发光 纳米硅颗粒 发光中心 porous film electroluminescence Si nanocrystallites luminescence centers
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