摘要
电子束曝光机是研制大规模集成电路的重要设备。它的运行必须由计算机进行控制并提供数据。本文简要地介绍了之类曝光机所需的控制软件及数据处理软件的构成及功能，并介绍了软件开发中的一些考虑。
Electron beam lithographic system is an important equipment for LSI manufacturing. Its operation must be controlled by a computer, and the data needed are also supplied by computers. The paper describes the construction and functions of the control software and data processing software of the system,andsome considerations at the development of the software are also presented.
出处
《现代科学仪器》
1994年第1期23-24,共2页
Modern Scientific Instruments
