摘要
使用WVASE32型椭偏仪,对Si基单层有机薄膜的测量方法进行分析;并对聚甲基丙烯酸甲酯(PMMA)材料和氟化聚酯材料进行测量,根据测量结果对阵列波导光栅(AWG)器件进行设计.在124nm到1700nm之间可测量出任意波长的折射率,其均方差(MSE)均远小于1,证明测量结果极其准确.同时探讨了对多层有机薄膜及氟化聚合物薄膜的测量方法.
We analyzed the measurement method of Si-based organic single-films using a model WVASE32 ellipsometer and measured the films of polymethyl methacrylate(PMMA) and fluoro-polyester material. According to the results, we designed the arrayed waveguide grating (AWG) devices. Refractive index can be exactly measured between 124 nm and 1 700 nm, and mean square error(MSE) is far less than 1. Such result suggested that the measurement is very precise. At the same time we discussed the measurements of multilayer organic films and polymer fluoride films.
出处
《吉林大学学报（理学版）》
CAS
CSCD
北大核心
2005年第2期185-189,共5页
Journal of Jilin University:Science Edition
基金
国家高技术研究发展计划研究项目(863)基金(批准号:2001AA312160)
国家重点基础研究发展规划项目(973)基金(批准号:TG2000036602)
国家自然科学基金(批准号:60177022)
关键词
列阵波导光栅
聚合物
光学系数
椭偏仪
arrayed waveguide grating
polymer
optical coefficient
ellipsometer
