摘要
利用TiCl_4+O_2体系,在高频等离子体化学气相淀积反应器中合成了纯度高、粒度细的TiO_2粒子。考察了工艺条件对TiO_2粒子物性的影响;探讨了TiO_2粒子晶型控制的方法。金红石型质量分数可通过工艺条件控制,减少TiO_2单体浓度可提高金红石型质量分数;也可通过在原料TiCl_4中添加AlCl_3等晶型转化剂,使产品转化为单一金红石型TiO_2。
Ultrafine TiO_2 particles were synthesized by TiCl_4 and O_2 in radio frequency plasma chemical vapor deposition reactor.The characters of product are as follows;size 20~200nm,special surface area 19~35m ̄2/g,content of rutile type 26%~65%,purity greater than 99.5%,major inpurity Cl about 0.1%~0.3%,The influence of position of reactants en-trance,pre-mix method of reactants and O_2 /TiCl_4 proportion on characters of product was re-searched.The control methods of crystal type was also researched,the content of rutile type is greater than 95%by adding crystal prempter AlCl_3.
出处
《华东理工大学学报(自然科学版)》
CAS
CSCD
1994年第5期591-594,共4页
Journal of East China University of Science and Technology
基金
国家自然科学基金
关键词
二氧化钛
化学气相淀积
超细粒子
titanium dioxide
chemical vapor deposition
preparation
ultrafine particle
radio frequency plasma