摘要
采用高频等离子体化学气相沉积法(RF-PCVD)法,以TiCl4 + O2为反应体系,制备出了纳米级的TiO2粉体。TEM、XRD等结果表明,颗粒基本呈球形,粒径小于100 nm。从模拟结果和实验结果可以看出:随着汽化温度升高,停留时间延长,二氧化钛颗粒粒度逐渐增大,同时金红石含量也增加。加入AlCl3晶型转化剂,有助于锐钛相向金红石相转化。
With TiCl4+O2 reaction system, nano-TiO2 powders were prepared by radio frequency plasma chemical vapor deposition (RF-PCVD). TEM、XRD results showed that the particles ware round. The mean particle diameter was less than 100 nm. It can concluded from model results and experiment results that, with the increasing of the reaction temperature, vaporization temperature and the resident time, the particle size increased, and the rutile content of TiO2 particle increased. The additive of AlCl3 makes the conversion from anatase to rutile easy.
出处
《钛工业进展》
CAS
2004年第5期29-33,共5页
Titanium Industry Progress
基金
国家自然科学基金项目(29776032)
山西省科技攻关项目(202092)
