摘要
论述硅与玻璃真空静电封接的工作原理、实验方法以及形成硅杯的各向异性腐蚀技术．
In this paper,The operating principle and experimental methods of Vacuum electrostatic welding for silicon-glass are discussed,and the silicon cup formation by anisotropy etching technique is also mentioned.
出处
《福州大学学报（自然科学版）》
CAS
CSCD
1994年第5期24-27,共4页
Journal of Fuzhou University(Natural Science Edition)
关键词
硅杯
静电封接
异向蚀刻技术
腐蚀
硅
玻璃
silicon cup
electrostatic welding
anisotropy etching technique.
