摘要
本文提出了一种新型的多晶硅梁微静电开关结构,并在考虑硅梁固定边张力的情况下对多晶硅梁的受力弯曲、静电吸合等情形进行了有效的静力学理论分析。 利用微静电开关的充电吸合、放电弹开这一电、机过程,本文还实现了一种成本极低的微硅梁静电驱动振荡器。初步研究结果表明,硅梁的振动频宽大约为2.1kHz,振动幅度较小,振动平衡点在下电极附近。
This paper proposes a novel micro electro-static switch structure of polysilicon beam,
and makes an effective statics analysis for the forced bending and the electrostatic switching
process of polysilicon beam by considering the fixed boundary tensions.
Utilizing the electro mechanical process corresponding to charge-and-switch-on and discharge
-and-switch-off of the micro electro-static switch, it also realizes a very chcap micro
polysilicon beam vibrator driven by static electricity. The results of the initial study show that
the maximal output frequency is about 2. 1kHz, the vibrating amplitude is very small and the
vibrating balance point is close to the lower electrode.
