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分子束外延生长Al_xGa_(1-x)As/GaAs超晶格及结构、光学特性研究

Study on the Structural and Optical Properties of Al_xGa_(1-x)As/GaAs Superlattice Grown by Molecular Beam Epitaxy
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摘要 报道了分子束外延生长80个周期的Al_xGa_(1-x)As/GaAs超晶格,X射线衍射和透射电镜的结果表明超晶格样品有良好的结构特性,光反射光谱观察到阱内的电子跃迁过程,其结果与理论计算相符。 An AlxGa1-xAs/GaAs superlattice with 80 periods was grown by molecular beam epitaxy. Results of X-ray diffraction and TEM indicate that the superlattice sample has good structural property. The electron transition process in quantum well is observed by modulated photo-reflection spectrum and agrees with the theoritical calculation.
出处 《固体电子学研究与进展》 CAS CSCD 北大核心 1993年第1期30-34,共5页 Research & Progress of SSE
关键词 分子束外延 超晶格 AIGaAs/GaAs Molecular Beam Epitaxy, Superlattices, X-ray Diffraction, Modulated Photo-reflection Spectrum
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  • 1徐仲英,梁基本,许继宗,郑宝真,李玉璋,徐俊英,曾一平,葛惟锟.GaAs-GaAlAs多量子阱结构发光的激子性质和温度特性[J]半导体学报,1987(03). 被引量:1
  • 2J. H. Neave,B. A. Joyce,P. J. Dobson,N. Norton. Dynamics of film growth of GaAs by MBE from Rheed observations[J] 1983,Applied Physics A Solids and Surfaces(1):1~8 被引量:1
  • 3黄绮,周均铭,贾惟义,程文芹,王彦云.分子束外延调制掺杂结构的低温光致荧光[J].物理学报,1987,36(2):165-171. 被引量:1

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