摘要
基于光固化快速成型制造技术 ,结合光刻技术、牺牲层技术以及化学镀膜技术 ,研究了一种新型的微细加工方法。提出了非导电极板 (光敏树脂固化物 )镀膜的新方案 ,设计了一种有较大驱动位移的微型电容式激励器 ,并介绍了其加工制作的工艺流程。实验结果表明此微细加工方法是可行的 ,从而开辟了微细加工的新途径。
Based on the photo curing rapid prototyping technology and in combination with the light photo etching technology, and sacrificial layer technology as well as electro less plating technology, a new method of micro fabrication is developed, and a new programme of electro less plating is suggested a capacitor micro actuator with big moving displacement is designed and the fabricating method for actuator is described. The experiment results indicate that the micro fabrication process is feasible whereby blazing a new way for micro fabrication.
出处
《西安理工大学学报》
CAS
2001年第1期74-77,共4页
Journal of Xi'an University of Technology
关键词
微细加工
快速成型
光刻
牺牲层
化学镀膜
micro fabrication
rapid prototyping
photo etching
sacrificial layer
electro less plating
