摘要
本文对自行研制的在玻璃衬底上形成的可擦重写预刻槽首次用扫描隧道显微镜(STM)进行了研究,观察到了表面沟槽及台阶,并对沟槽的深度、对称性及形状、表面局域性质给出定量、直观的描述,弥补了其它手段的不足。
The groove structure in glass substrate, commonly used in the fabrication of optical discs, has been studied with scanning tunnelling microscope (STM). The STM results show not only the groove structures such as the size, shape and depth but also the local properties of the surface which complement the results obtained by other analysis techniques.
出处
《物理测试》
CAS
1993年第4期163-166,共4页
Physics Examination and Testing
关键词
显微镜
扫描隧道
光盘预刻槽
STM
scanning tunnelling microscope, photoresist pregroove, local properties of surface
