摘要
研究了沉积在硅油表面Al薄膜的特征表面形貌 (一类具有准周期特征的带状结构 )及其形成过程。实验发现 :沉积结束后 ,随着Al薄膜样品在真空室中放置时间Δt的增加 ,Al薄膜中首先出现带状且不均匀的物质自发凝聚现象 ,随后逐渐演变成由一系列畴块有序排列而成的准周期带状结构。带状结构中畴块 (一般为长方形 )的大小不均 ,其宽度分布的最可几值约在 5 μm～ 2 0 μm之间 ;在一定区域内 ,同一条带状结构的畴块长度基本一致 ,且随时间Δt的增加而增加。分析表明 :由于液体基底与薄膜之间的特征相互作用 ,使薄膜中的原子及其团簇可以较自由地自发凝聚和重组 ,释放薄膜中的内应力 ,从而引起此类具有准周期特征带状结构的形成。
Rectangular domain formation and its alignment in aluminum films,grown on silicone oil surface by vacuum deposition,were observed with an optical microscope.After deposition and exposure to air for some time,parallel rectangle-shaped domains spontaneously form out of the continuous non-uniformly distributed aluminum films and align side-by-side in a chain.As time increases,these domains grow into small rectangles with almost identical lengty but varied width,ranging from 5 μm to 20μm.Interesting finding is that a quasi-periodic variations in the domain width seem to exist along the band-shaped chain.The length of the neighboring domains appears to be identical at a short interval of the chain,but increases slowly with time.Possible mechanisms responsible for the growth and alignment of these domains are tentatively explained.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2004年第5期324-328,共5页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金 (No .10 1740 63 )
浙江省青年人才基金(No.1997-RC960 3 )资助课题
