摘要
回顾了步进高度测量技术在纳米计量中的应用 .分析了在步进高度测量技术中的一些分析方法、算法和误差源 ,表明了不同的算法会导致不同的结果 .提出了步进高度测量中的最佳操作过程 .
A review of step height metrology techniques used in nanotechnology applications is presented. The analysis methods, algorithms and error sources encountered in step height metrology are outlined. Results showing some variations that occur when different algorithms are used are presented, and best practice procedures for accurate step height metrology are described.
出处
《纳米技术与精密工程》
CAS
CSCD
2004年第3期196-202,共7页
Nanotechnology and Precision Engineering
