摘要
为了检定高准确度位移传感器、几何量计量定位、微细加工测量,同时,也测量那些可以转换为微位移或光程差的其它物理量。基于双光栅干涉仪原理,设计了一种数字式位移传感器,对该装置进行了理论分析和计算机模拟,实验验证:该测量装置的绝对误差不大于0.019μm。
In order to calibrate displacement sensors,location in geometrical metrology,micro mechanical working measurement and measure other physical quantities which can be transferred into displacement or optical path difference,a digital displacement sensor is introduced.This equipment is based on the principle of double grating interferometer,one is simulated by computer and analysed in theory. The test shows the absolute error of this equipment is 0.019 μm.
出处
《传感器技术》
CSCD
北大核心
2004年第10期22-23,26,共3页
Journal of Transducer Technology
