摘要
在半导体制造车间中,设备是非常昂贵的,设备折旧与维修占生产成本组成的最大比重,设备利用率的提高显得尤为重要,因此设备效率和设备能力已成为半导体制造者最关心的问题之一。本文针对该问题,系统地介绍了半导体晶圆制造中设备效率和设备能力的衡量标准及其数据收集,以期达到提高设备利用率的目的。
As depreciation and maintenance costs of the expensive equipments account for a bigpart in production costs, semiconductor manufacturers strive to run their equipments as efficientlyas possible. This paper describes briefly the measurement of equipment efficiency and equipmentcapacity and introduces mainly its applications in semiconductor wafer manufactory.
出处
《半导体技术》
CAS
CSCD
北大核心
2004年第9期35-38,共4页
Semiconductor Technology
