摘要
提出一种应用线阵CCD自动测量圆度误差的新方法。论述了系统利用劳埃德镜干涉装置 ,通过线阵CCD图像处理系统自动测量圆度误差的工作原理及过程设计。测量结果表明 ,新的测量方法实现了圆度误差的实时精确在线测量。
A new method of auto measuring the roundness error by means of the linear CCD (charge coupled device) is proposed. The principle and design process of the system to measure the roundness error using the Lloyd mirror, linear CCD image processing system are described. The measuring results indicate that the accurate, real time and on line measuring of the roundness error can be realized.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2004年第8期1013-1017,共5页
Chinese Journal of Lasers
关键词
光学技术与仪器
圆度误差
激光干涉
劳埃德镜
CCD
optics technique and instrument
roundness error
laser interference
Lloyd mirror
CCD
