摘要
通过直接的数值模拟,分析了原子束在激光驻波场下传播的动力学行为.估计了Cr原子沉积在基片上的焦点的大小,同时还发现一些实验参数会影响原子刻蚀的精度:如原子束的速度分布、激光的失谐量和激光束的直径等.
Building on direct numerical calculation, it analyzes the dynamics of atoms propagating through a laser standing wave (SW) potential in the regime of immersion-lens.The spot size of Cr atomic deposition is estimated. It is also shown that some physical quantities, such as atomic velocity distribution, laser detuning and laser beam radius, play important roles in determining the quality of atom lithography.
出处
《计算物理》
CSCD
北大核心
2004年第3期327-332,共6页
Chinese Journal of Computational Physics
