摘要
一、引言离子镀技术是近些年来发展很快的表面加工新技术、新工艺.而离子镀TiN膜(称I^P-TiN)由于它的硬度高、摩擦系数低、化学稳定性好,而作为各种耐磨、耐蚀。
The research work of the authors in recent years on the property of IP-TiNfilm modified by adding trace rare-earth elements Y and La and its applicationhave systematically been introduced. Results of property test and analysis of themodified film by X-ray diffraction, EMPA and TEM etc. are reported.
出处
《真空科学与技术学报》
EI
CAS
CSCD
1991年第2期137-140,共4页
Chinese Journal of Vacuum Science and Technology
