摘要
通过对Cu/Ag、Ag/Al和Al/Cu复合多晶薄膜各组分之间的X射线衍射强度之比与已知薄膜厚度之比的分析,得出了衍射强度与薄膜厚度之间存在着近似的线性关系。X射线衍射强度因子比的实验结果与理论计算值之间,相差50%左右。文章对造成这一差异的可能原因,做了初步讨论。
In this paper, by analyzing the relations between the thickness of film and the ratiosof X-ray diffraction intensity from each component of the composite polycrystalline thinfilms of Cu/Ag,Ag/Al and Al/Cu, it is shown that there is a linear relationship betweenthe thickness and the intensity ratios. However the experimental results differ from the the-oretical calculations by 50%, The possible reasons for this discrepancy are preliminarilydiscussed in this paper.
出处
《真空科学与技术学报》
EI
CAS
CSCD
1991年第1期10-14,共5页
Chinese Journal of Vacuum Science and Technology
