摘要
研究溶胶-凝胶法制备不同浓度Y2O3掺杂对ZnO-Bi2O3压敏薄膜微观结构和电性能的影响。研究结果表明:Y2O3掺杂ZnO薄膜在750°C空气气氛下退火1h,ZnO薄膜的特征峰与ZnO的六方纤锌矿结构相匹配;ZnO晶粒直径随着掺杂量的增加而减小,Y2O3稀土掺杂氧化锌晶粒细化;薄膜厚度均匀且每一层厚度约80nm。研究结果还表明:当Y3+掺杂浓度为0.2%(摩尔分数)时,ZnO薄膜的非线性伏安特性最好,其漏电流为0.46mA,电位梯度为110V/mm,非线性系数为3.1。
研究溶胶-凝胶法制备不同浓度Y2O3掺杂对ZnO-Bi2O3压敏薄膜微观结构和电性能的影响。研究结果表明:Y2O3掺杂ZnO薄膜在750°C空气气氛下退火1h,ZnO薄膜的特征峰与ZnO的六方纤锌矿结构相匹配;ZnO晶粒直径随着掺杂量的增加而减小,Y2O3稀土掺杂氧化锌晶粒细化;薄膜厚度均匀且每一层厚度约80nm。研究结果还表明:当Y3+掺杂浓度为0.2%(摩尔分数)时,ZnO薄膜的非线性伏安特性最好,其漏电流为0.46mA,电位梯度为110V/mm,非线性系数为3.1。
出处
《中国有色金属学会会刊：英文版》
CSCD
2012年第S1期110-114,共5页
Transactions of Nonferrous Metals Society of China
基金
Projects (BK2011243, BK2012156) supported by the Natural Science Foundation of Jiangsu Province, China
Project (EIPE11204) supported by the State Key Laboratory of Electrical Insulation and Power Equipment, China
Project (KF201104) supported by the State Key Laboratory of New Ceramic and Fine Processing, China
Project (KFJJ201105) supported by the Opening Project of State key Laboratory of Electronic Thin Films and Integrated Devices, China
Project (10KJD430002) supported by the Universities Natural Science Research Project of Jiangsu Province,China
Project (CJ20120058) supported by the Application Program for Basic Research of Changzhou, China
Project (11JDG084) supported by the Research Foundation of Jiangsu University, China
