摘要
基于电解质溶液导电的特性,研制了可测量微升级流量的高灵敏度微电解池式微流量传感器。由电解反应产生的电流大小确定流体流过的时间t,再根据流体流量Q、管道截面积S及液体通过的时间t,即可以得出流过管道的液体量。用流体仿真软件CFX对所设计的器件进行仿真,用微机械加工工艺制作出微管道,并用蒸镀及金属腐蚀的方法制作出微电极。实验表明,所制作的微电解池式微流量传感器符合仿真结果,管道中有无流体时电流变化明显。传感器的灵敏度为蠕动泵的泵速,即1.71μA.s/μL,当蠕动泵的泵速为0.5 r/min时,测得的电流值为10μА。
A micro-flow sensor with a type of micro-electrolytic cell was developed by the characteristics of the electrolyte solution, which it possesses high sensitivity and can test a flow of microlitre scale. The time interval of flowing of the liquid t can be obtained by testing of the electric current produced by electrolytic reaction, and then the flow of the liquid passing the channels can be calculated according to the flow of liquid Q and the cross section of the channels 5 and the interval time t. The CFX software was used to simulate the sensor and the microchan-nels were fabricated by silicon processing method, and the micro-electrode was made by metal evaporation and metal erosion. The experimental results indicate that the properties of the sensor are in agreement with the results of the simulation and the electric current is not changed obviously when there is no flowing liquid in the channels. The sensitivity of the sensor is 1.71 μA·s/μL. It can produce an electric current of 10 μA when the speed of the peristaltic pump is 0.5 r/min.
出处
《微细加工技术》
EI
2007年第1期41-45,55,共6页
Microfabrication Technology
基金
国家自然科学基金资助项目(60474055)
863"微流体囊式阵列多光谱连续探测微小型生化分析系统研究"资助项目
关键词
微流量传感器
微电解池
微电极
CFX仿真
硅加工工艺
micro-flow sensor
micro-electrolytic cell
microelectrode
CFX simulation
silicon processing method
