摘要
本文讨论了利用硅V型槽法制作高精度线性光纤阵列的可行性,介绍了硅V型槽制作机理,对影响器件精度的主要因素进行了分析,并在器件设计、制作中给予充分考虑。根据器件的可靠性要求,分析了用于光纤粘接的粘接剂应满足的特性,并对紫外固化胶和红外粘接剂进行实验对比,结果表明,Norland紫外固化胶和353ND红外粘接剂为最佳选择。用各向异性湿法腐蚀技术制作了硅V型槽,进行了光纤排列、定位及端面处理,制作出了高精度线性光纤阵列。对端面面型误差和表面粗糙度的测试后,结果表明光纤阵列端面纵向位置误差≤324 nm,表面粗糙度均方根值小于3.85nm。
The principle of making the silicon V-grooves and the feasibility of manufacturing high accuracy linear optical fiber array with the silicon V-grooves were introduced, and the main factors influencing on the accuracy of the devices were analyzed and they will be extremely considered in the process of designing and making the devices. By requirement of the devices, the characteristics of the adhesive used for adhesion of the optic fibers were analyzed and the ultraviolet epoxy adhesive was experimentally compared with the infrared adhesive. The results indicate that the Norland ultraviolet epoxy adhesive and the 353ND infrared adhesive are the optimum adhesives. The silicon V-groove array was prepared by anisotropic etching process, and then the fibers were arranged and adhered in corresponding V-grooves. After treatment of orientation and end section, a high accuracy linear optical fiber array was prepared. After the error of the end section and the surface roughness were measured, the results indicate that the error of end sections of the fibers is less than and equal to 3240 nm and the root-mean-square value of the surface roughness is less than or equal to 3.85 nm.
出处
《微细加工技术》
EI
2007年第1期15-18,共4页
Microfabrication Technology
基金
国家自然科学基金资助项目(60578036)
中国科学院"优秀博士学位论文
院长奖获得者科研启动专项资金"资助项目
应用光学国家重点实验室开放基金资助项目
关键词
线性光纤阵列
硅V型槽
误差分析
粘接剂
linear optical fiber array
silicon V-grooves
error analysis
adhesive
surface testing
