摘要
The face velocities of the high efficiency particulate air filters and the ultra low penetration airfilters in fan filter units (FFUs) have large relative standard deviation and turbulivity. It seriously affects the unidirectivity of the flow in the unidirectional flow clean zone and cleanroom. The cross contamination in this kind of unidirectional flow area is hardly controlled. It is significant to find optional method for keeping the face velocity uniformity of FFU and reducing the face velocity turbulivity of FFU, furthermore, to keep the cleanliness level under FFUs. The normal and easy method is to add flow rectifiers under filters. FFUs with various flow rectifiers have been tested. The uniformity and turbulivity of facevelocity under the FFU are presented in this paper. The influence of the facevelocity uniformity and turbulivity on the contamination boundary of the unidirectional flow is studiedas well.
风机过滤器机组中的高效和超高效过滤器的面风速有很大的不均匀度和紊流强度 ,对单向流洁净区和洁净室中的气流单向性有很大影响 .这种情况下 ,很难控制单向流区域内的交叉污染 .找出优化的方法来保持风机过滤器机组的面风速均匀性及减少面风速的湍流度 ,对于保持风机过滤器机组下方区域的洁净度有重要意义 .采用常用且简便的方法 ,在过滤器下加装均流装置 ,对不同的均流装置进行了测试 .给出风机过滤器机组下的面风速均匀性及湍流度的数据 。
