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ZnO薄膜的制备及其光学性能 被引量:11

Preparation and optical properties of ZnO thin films
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摘要 以柠檬酸为络合剂、采用无机盐溶胶 -凝胶法 ,在玻璃基片上用提拉法制备了多孔ZnO薄膜。利用红外光谱、DTA -TG、XRD、SEM、UV -VIS透射等分析测试 ,考察了溶胶 -凝胶制备特征、热处理过程和热处理温度下薄膜的成相、表面形貌以及光学性能。结果表明 4 0 0℃热处理 1h的ZnO薄膜已开始晶化 ,晶型是六方纤锌矿 ;6 0 0℃热处理 1h的薄膜表面为多孔结构 ,粒径和孔径均匀 ;在可见光范围 ,薄膜的光透射率超过 85 % ,在波长 380nm开始出现紫外吸收 ;从而为该材料制作染料敏化的太阳能电池阳极薄膜打下良好的基础。 Porous ZnO thin films coated on quartz glass substrates by the dip- coating are prepared by the inorganic sol-gel method using citric acid as chelating agent. Characteristics of sol and gel, phase formation, morphology and optical properties at different annealing temperatures of ZnO films are investigated by using FT-IR absorbance spectrum, DTA - TG, XRD, SEM and UV-VIS transmittance spectra. The experimental results show that ZnO thin films derived from zinc citrate sol have lower crystallization temperature (below 400℃) and the crystalline is wurtzite. The surface of the films fired at 600℃ for 1h are porous, and the grain size and porous size of ZnO films are uniform. The optical transmittances become higher than 85% in the visible range and UV absorption of the films appears at about 380nm,so that it is possible to prepare anode of dye-sensitized solar cell by using this films.
出处 《兵器材料科学与工程》 CAS CSCD 2004年第1期34-38,共5页 Ordnance Material Science and Engineering
基金 天津市自然科学基金资助项目
关键词 ZNO薄膜 光学性能 柠檬酸 络合溶胶-凝胶法 玻璃基片 ZnO thin films chelating sol-gel method optical properties citric acid
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