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Averaged hole mobility model of biaxially strained Si
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作者 宋建军 朱贺 +3 位作者 杨晋勇 张鹤鸣 宣荣喜 胡辉勇 《Journal of Semiconductors》 EI CAS CSCD 2013年第8期15-18,共4页
We aim to establish a model of the averaged hole mobility of strained Si grown on(001),(101),and (111) relaxed Si_(1-x)Ge_x substrates.The results obtained from our calculation show that their hole mobility va... We aim to establish a model of the averaged hole mobility of strained Si grown on(001),(101),and (111) relaxed Si_(1-x)Ge_x substrates.The results obtained from our calculation show that their hole mobility values corresponding to strained Si(001),(101) and(111) increase by at most about three,two and one times,respectively, in comparison with the unstrained Si.The results can provide a valuable reference to the understanding and design of strained Si-based device physics. 展开更多
关键词 strain model mobility
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