Dip-pen na.nolithography （DPN） is a useful method for directly printing materials on surfaces with sub-50nm resolution. Because it, involves the physical transport of materials from a scanning probe tip to a surface...Dip-pen na.nolithography （DPN） is a useful method for directly printing materials on surfaces with sub-50nm resolution. Because it, involves the physical transport of materials from a scanning probe tip to a surface and the subsequent chemical interaction of that material with the surface, there are many factors to consider when attempting to understand DPN. In this review, we overview the physical and chemical processes that are known to play a role in DPN, Through a detailed review of the literature, we classify inks into three general categories based on their transport properties, and highlight the myriad ways that. DPN can be used to perform chemistry at the tip of a scanning probe.展开更多
Nanolithography is a patterning technique for the fabrication of nano-scale structures.A promising method of nanolithography known as scanning probe lithography has particularly extensive applications for its high res...Nanolithography is a patterning technique for the fabrication of nano-scale structures.A promising method of nanolithography known as scanning probe lithography has particularly extensive applications for its high resolution,high reliability,and simple operation.In this paper,a novel electrothermally actuated cantilever with integrated heater,thermal conductor and actuator for scanning probe lithography is proposed.Cantilevers are designed in an 8×4 array.Analytical models are presented to simulate the temperature distribution,deflection and thermal crosstalk of the cantilever array.This structure is successfully fabricated.It is demonstrated that this structure can produce a tip deflection of 16.9 μm at an actuation current of 5.5 mA and the thermal crosstalk between the cantilevers is neglected.展开更多
基金Acknowledgements C.A.M. acknowledges the U. S. Air Force Office of Scientific Research （AFOSR, Awards FA9550-12-1-0280 and FA9550-12-1-0141）, the Defense Advanced Research Projects Agency （DARPA, Award N66001-08-1-2044） and the National Science Foundation （NSF, Awards DBI-1152139 and DMB-1124131） for support of this research. K. A. B. and X. L. gratefully acknowledges support from Northwestern University＇s International Institute for Nanotechnology. D. J. E. acknowledges the DoD and AFOSR for a National Defense Science and Engineering Graduate （NDSEG） Fellowship, 32 CFR 168a.
文摘Dip-pen na.nolithography （DPN） is a useful method for directly printing materials on surfaces with sub-50nm resolution. Because it, involves the physical transport of materials from a scanning probe tip to a surface and the subsequent chemical interaction of that material with the surface, there are many factors to consider when attempting to understand DPN. In this review, we overview the physical and chemical processes that are known to play a role in DPN, Through a detailed review of the literature, we classify inks into three general categories based on their transport properties, and highlight the myriad ways that. DPN can be used to perform chemistry at the tip of a scanning probe.
基金supported by the National Natural Science Foundation of China (Grant No.60576053)Hi-Tech Research and Development Program of China (Grant No.2007AA03Z333)
文摘Nanolithography is a patterning technique for the fabrication of nano-scale structures.A promising method of nanolithography known as scanning probe lithography has particularly extensive applications for its high resolution,high reliability,and simple operation.In this paper,a novel electrothermally actuated cantilever with integrated heater,thermal conductor and actuator for scanning probe lithography is proposed.Cantilevers are designed in an 8×4 array.Analytical models are presented to simulate the temperature distribution,deflection and thermal crosstalk of the cantilever array.This structure is successfully fabricated.It is demonstrated that this structure can produce a tip deflection of 16.9 μm at an actuation current of 5.5 mA and the thermal crosstalk between the cantilevers is neglected.
