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脉冲阴极电沉积羟基磷灰石涂层 被引量:7
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作者 赵中伟 陈爱良 +2 位作者 陈星宇 孙培梅 李洪桂 《中国有色金属学报》 EI CAS CSCD 北大核心 2005年第12期2023-2027,共5页
对脉冲阴极电沉积与恒电位阴极电沉积制备的羟基磷灰石涂层膜进行了对比实验。结果表明:由于脉冲电沉积的一个关断时间使离子得以从溶液本体向电极表面扩散,在下一脉冲来临时浓差极化的减小有利于HAP的生长;在一定的导通时间下,关断时... 对脉冲阴极电沉积与恒电位阴极电沉积制备的羟基磷灰石涂层膜进行了对比实验。结果表明:由于脉冲电沉积的一个关断时间使离子得以从溶液本体向电极表面扩散,在下一脉冲来临时浓差极化的减小有利于HAP的生长;在一定的导通时间下,关断时间的延长有利于羟基磷灰石的沉积,但时间的过度延长不利于羟基磷灰石的沉积;当通电时间为5 s时,其最佳关断时间为2 s;沉积时阴极极化的增强虽有利于膜的生长,但极化过于强烈(阴极电位为-1.0 V(vs SCE)时,涂层易脱落。 展开更多
关键词 羟基磷灰石 涂层 脉冲电沉积 恒电位沉积
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Centimeter-scale growth of two-dimensional layered high-mobility bismuth films by pulsed laser deposition 被引量:11
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作者 Zhibin Yang Zehan Wu +1 位作者 Yongxin Lyu Jianhua Hao 《InfoMat》 SCIE CAS 2019年第1期98-107,共10页
Ever since discovery of graphene,two-dimensional(2D)materials become a new tool box for information technology.Among the 2D family,ultrathin bismuth(Bi)has attracted a great deal of attention in recent years due to it... Ever since discovery of graphene,two-dimensional(2D)materials become a new tool box for information technology.Among the 2D family,ultrathin bismuth(Bi)has attracted a great deal of attention in recent years due to its unique topological insulating properties and large magnetoresistance.However,the scalable synthesis of layered Bi ultrathin films is rarely been reported,which would greatly restrict further fundamental investigation and practical device development.Here,we demonstrate the direct growth of homogeneous and centimeter-scale layered Bi films by pulsed laser deposition(PLD)technique.The as-grown Bi film exhibits high-purity phase and good crystallinity.In addition,both(111)and(110)-oriented Bi films can be synthesized by precisely controlling the processing temperature.The characterization of optical properties shows a thickness dependent band gaps(0.075-0.2 eV).Moreover,Bi thin-film-based field-effect transistors have been demonstrated,exhibiting a large carrier mobility of 220 cm2 V−1 s−1.Our work suggests that the PLD-grown Bi films would hold the potential to develop spintronic applications,electronic and optoelectronic devices used for information science and technology. 展开更多
关键词 2D materials bismuth film nanoscale information devices pulsed laser deposition wafer scale growth
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脉冲激光冲击效应对定域电沉积铜晶粒及其表面形貌的影响 被引量:6
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作者 聂昕 张朝阳 +4 位作者 刘皋 陆海强 庄鸿武 戴学仁 焦健 《中国激光》 EI CAS CSCD 北大核心 2017年第4期129-135,共7页
为了研究脉冲激光冲击效应对定域电沉积铜晶粒及其表面形貌的影响,搭建了脉冲激光电化学复合沉积实验系统,并进行了理论分析和实验验证。对沉积过程中的冲击效应进行了检测,采用扫描电子显微镜观察沉积体的表面形貌。结果表明,利用脉冲... 为了研究脉冲激光冲击效应对定域电沉积铜晶粒及其表面形貌的影响,搭建了脉冲激光电化学复合沉积实验系统,并进行了理论分析和实验验证。对沉积过程中的冲击效应进行了检测,采用扫描电子显微镜观察沉积体的表面形貌。结果表明,利用脉冲激光与电沉积液的相互作用,可细化定域电沉积晶粒。此外,激光能量增大时,沉积体晶粒细化,宽度增大,沉积体表面形貌更加平整,内部气孔减少。 展开更多
关键词 激光技术 脉冲激光 复合沉积 冲击效应 阴极过电位 晶粒细化 表面形貌
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脉冲真空电弧离子能量的测量研究 被引量:4
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作者 蔡长龙 王季梅 +1 位作者 弥谦 严一心 《真空电子技术》 2004年第2期52-54,共3页
离子能量是影响脉冲真空电弧离子镀镀膜质量的一个重要参数,因而测量真空电弧中离子的能量非常重要。本文介绍了一种测量脉冲真空电弧离子能量的装置—五栅网,分析了其测量离子能量的原理,并用它测量了脉冲真空电弧的离子能量。
关键词 脉冲电弧 离子镀 离子能量
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Thermal stability of the Cr-coated zirconium alloy microstructure prepared by pulsed laser deposition 被引量:1
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作者 Bo Li Hui-Long Yang +3 位作者 Reuben Holmes Li-Juan Cui Sho Kano Hiroaki Abe 《Tungsten》 EI CSCD 2024年第2期333-341,共9页
Cr-coated zirconium alloy was prepared by pulsed laser deposition(PLD)for the application of accident-tolerant fuel cladding in light water reactors.The microstructural characteristics of the Cr coating and its evolut... Cr-coated zirconium alloy was prepared by pulsed laser deposition(PLD)for the application of accident-tolerant fuel cladding in light water reactors.The microstructural characteristics of the Cr coating and its evolution with temperature were investigated using grazing incidence X-ray diff raction and in situ heating transmission electron microscopy(TEM).Results show that the microstructure of the laser-deposited Cr coatings consists mainly of fine and non-specific shaped nano-crystals in the inner layer and columnar crystals in the outer layer.The recrystallization of the Cr-coating layer starts at 300–400℃ to release the high strain introduced by PLD,and the grain coalescence starts at temperatures>400°C.Upon annealing,the(110)-texture gradually intensifi es because of its high reticular density and low close-packed energy.Additionally,in situ heating TEM observation shows the presence of cavities on the Cr–Zr interface,which may result from the interdiff usion and/or the transformation from amorphous to crystalline. 展开更多
关键词 Accident tolerant fuel Crcoating Interface MICROSTRUCTURE pulsed laser deposition
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An ultra-fast charging strategy for lithium-ion battery at low temperature without lithium plating 被引量:5
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作者 Yudi Qin Pengyu Zuo +7 位作者 Xiaoru Chen Wenjing Yuan Rong Huang Xiaokan Yang Jiuyu Du Languang Lu Xuebing Han Minggao Ouyang 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2022年第9期442-452,I0013,共12页
Conventional charging methods for lithium-ion battery(LIB)are challenged with vital problems at low temperatures:risk of lithium(Li)plating and low charging speed.This study proposes a fast-charging strategy without L... Conventional charging methods for lithium-ion battery(LIB)are challenged with vital problems at low temperatures:risk of lithium(Li)plating and low charging speed.This study proposes a fast-charging strategy without Li plating to achieve high-rate charging at low temperatures with bidirectional chargers.The strategy combines the pulsed-heating method and the optimal charging method via precise control of the battery states.A thermo-electric coupled model is developed based on the pseudo-twodimensional(P2D)electrochemical model to derive charging performances.Two current maps of pulsed heating and charging are generated to realize real-time control.Therefore,our proposed strategy achieves a 3 C equivalent rate at 0℃ and 1.5 C at-10℃ without Li plating,which is 10–30 times faster than the traditional methods.The entropy method is employed to balance the charging speed and the energy efficiency,and the charging performance is further enhanced.For practical application,the power limitation of the charger is considered,and a 2.4 C equivalent rate is achieved at 0℃ with a 250 kW maximum power output.This novel strategy significantly expands LIB usage boundary,and increases charging speed and battery safety. 展开更多
关键词 Lithium-ion battery pulsed heating Fast charging Low temperature Lithium deposition
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脉冲真空电弧离子镀沉积速率的研究 被引量:5
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作者 蔡长龙 王季梅 +3 位作者 弥谦 杭凌侠 严一心 徐均琪 《表面技术》 EI CAS CSCD 北大核心 2002年第6期27-29,共3页
薄膜沉积速率是影响薄膜性能的重要参数 ,研究它对于沉积优良的类金刚石薄膜具有重要的作用。针对脉冲真空电弧离子镀的具体工艺参数 ,研究了各种工艺参数对类金刚石薄膜沉积速率的影响 ,找出了影响类金刚石薄膜沉积速率的主要参数 。
关键词 脉冲真空电弧离子镀 沉积速率 研究 类金刚石薄膜
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Pulsed Laser Deposition ZnS Buffer Layers for CIGS Solar Cells 被引量:4
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作者 Pai-feng Luo Guo-shun Jiang Chang-fei Zhu 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2009年第1期97-101,共5页
Polycrystalline ZnS films were prepared by pulsed laser deposition (PLD) on quartz glass substrates under different growth conditions at different substrate temperatures of 20, 200, 400, and 600 ℃, which is a suita... Polycrystalline ZnS films were prepared by pulsed laser deposition (PLD) on quartz glass substrates under different growth conditions at different substrate temperatures of 20, 200, 400, and 600 ℃, which is a suitable alternative to chemical bath deposited (CBD) CdS as a buffer layer in Cu(In,Ga)Se2 (CIGS) solar cells. X-ray diffraction studies indicate the films are polycrystalline with zinc-blende structure and they exhibit preferential orientation along the cubic phase β-ZnS (111) direction, which conflicts with the conclusion of wurtzite structure by Murali that the ZnS films deposited by pulse plating technique was polycrystalline with wurtzite structure. The Raman spectra of grown films show Al mode at approximately 350 cm^-1, generally observed in the cubic phase β-ZnS compounds. The planar and the cross-sectional morphology were observed by scanning electron microscopic. The dense, smooth, uniform grains are formed on the quartz glass substrates through PLD technique. The grain size of ZnS deposited by PLD is much smaller than that of CdS by conventional CBD method, which is analyzed as the main reason of detrimental cell performance. The composition of the ZnS films was also measured by X-ray fluorescence. The typical ZnS films obtained in this work are near stoichiometric and only a small amount of S-rich. The energy band gaps at different temperatures were obtained by absorption spectroscopy measurement, which increases from 3.2 eV to 3.7 eV with the increasing of the deposition temperature. ZnS has a wider energy band gap than CdS (2.4 eV), which can enhance the blue response of the photovoltaic cells. These results show the high-quality of these substitute buffer layer materials are prepared through an all-dry technology, which can be used in the manufacture of CIGS thin film solar cells. 展开更多
关键词 ZnS thin films pulsed laser deposition Chemical bath deposition Buffer layer
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High-throughput combinatorial approach expeditesthe synthesis of a lead-free relaxor ferroelectric system
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作者 Di Zhang Katherine J.Harmon +21 位作者 Michael J.Zachman Ping Lu Doyun Kim Zhan Zhang Nicholas Cucciniello Reid Markland Ken William Ssennyimba Hua Zhou Yue Cao Matthew Brahlek Hao Zheng Matthew M.Schneider Alessandro R.Mazza Zach Hughes Chase Somodi Benjamin Freiman Sarah Pooley Sundar Kunwar Pinku Roy Qing Tu Rodney J.McCabe Aiping Chen 《InfoMat》 SCIE CSCD 2024年第9期75-90,共16页
Developing novel lead-free ferroelectric materials is crucial for next-generationmicroelectronic technologies that are energy efficient and environmentfriendly.However,materials discovery and property optimization are... Developing novel lead-free ferroelectric materials is crucial for next-generationmicroelectronic technologies that are energy efficient and environmentfriendly.However,materials discovery and property optimization are typicallytime-consuming due to the limited throughput of traditional synthesismethods.In this work,we use a high-throughput combinatorial synthesisapproach to fabricate lead-free ferroelectric superlattices and solid solutions of(Ba_(0.7)Ca_(0.3))TiO_(3)(BCT)and Ba(Zr_(0.2)Ti_(0.8))O_(3)(BZT)phases with continuous variationof composition and layer thickness.High-resolution x-ray diffraction(XRD)and analytical scanning transmission electron microscopy(STEM)demonstratehigh film quality and well-controlled compositional gradients.Ferroelectricand dielectric property measurements identify the“optimal propertypoint”achieved at the composition of 48BZT–52BCT.Displacement vectormaps reveal that ferroelectric domain sizes are tunable by varying{BCT–BZT}Nsuperlattice geometry.This high-throughput synthesis approach can be appliedto many other material systems to expedite new materials discovery and properties optimization,allowing for the exploration of a large area of phasespace within a single growth. 展开更多
关键词 FERROELECTRICS high-resolution x-ray diffraction high-throughput combinatorial synthesis pulsed laser deposition scanning transmission electron microscopy SUPERLATTICES
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Self-assembly In2Se3/SnSe2 heterostructure array with suppressed dark current and enhanced photosensitivity for weak signal 被引量:4
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作者 Zhaoqiang Zheng Peifeng Chen +5 位作者 Jianting Lu Jiandong Yao Yu Zhao Menglong Zhang Mingming Hao Jingbo Li 《Science China Materials》 SCIE EI CSCD 2020年第8期1560-1569,共10页
Functional van der Waals(vdWs)heterostructures based on layered materials have shown tremendous potential in next-generation optoelectronic devices.To date,numerous vdWs heterostructures have been investigated based o... Functional van der Waals(vdWs)heterostructures based on layered materials have shown tremendous potential in next-generation optoelectronic devices.To date,numerous vdWs heterostructures have been investigated based on stacking or epitaxial growth technology.However the complicated synthesis process greatly limits the large-scale integration of the heterostructure device array,which is essential for practical applications.Here,a planar photodetector array with an out-of-plane vertical In2Se3/SnSe2heterostructure as the photosensitive channel was self-assembled through a pulsed laser deposition(PLD)technique.The vertical built-in field was exploited to suppress the dark current and separate the photogenerated carriers.The realized devices possess an ultralow dark current of 6.3 p A,combined with a high detectivity of 8.8×1011Jones and a high signal-to-noise ratio(SNR)beyond 3×104.These performance metrics not only are one order of magnitude superior to pure In2Se3device,but also demonstrate the unique advantage of detecting weak signals.In addition,this heterostructure photodetector array can further be constructed on flexible polyimide(PI)substrate.These flexible devices also demonstrate effective light detection capability and the photoresponse remains unchanged even after 200 cycles of bending.These findings pave a way toward the development of next-generation large area and high integration optoelectronic technologies. 展开更多
关键词 2D material PHOTODETECTOR pulsed-laser deposition van der Waals heterostructure
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FUNDAMENTAL PROBLEMS IN PULSED-BIAS ARC DEPOSITION 被引量:1
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作者 G.Q. Lin Z.F. Ding +6 位作者 D. Qi N.H. Wang M.D. Huang D.Z. Wang Y.N. Wang C. Dong L.S. Wen 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2002年第1期91-103,共13页
Arc deposition, a widely used surface coating technique, has disadvantages such as large droplet size and high deposition temperature. Recent trend in its renovation is the introduction of pulsed bias at the. substrat... Arc deposition, a widely used surface coating technique, has disadvantages such as large droplet size and high deposition temperature. Recent trend in its renovation is the introduction of pulsed bias at the. substrate. The present paper attempts to describe the deposition process of TiN films using this technique with emphasis laid on the understanding of the basic problems such as discharge plasma properties, temperature calculation, and droplet size reduction. We show that this technique improves the film micro structure and quality, lowers deposition temperature, and allows coatings on insulating substrates. After analyzing load current oscillation behaviors, we have determined that the plasma load is of capacitance nature due to plasma sheath and that it is equivalent to a circuit element consisting of parallel capacitance and resistance. At last, we point out the remaining problems and future development of the pulsed-bias arc deposition technique. 展开更多
关键词 arc deposition pulsed bias PLASMA
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Dynamic simulation on the preparation process of thin films by pulsed laser 被引量:1
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作者 张端明 李智华 +4 位作者 郁伯铭 黄明涛 关丽 钟志成 李国栋 《Science China Mathematics》 SCIE 2001年第11期1485-1496,共12页
An ablation model of targets irradiated by pulsed laser is established. By using the simple energy balance conditions, the relationship between ablation surface location and time is derived. By an adiabatic approximat... An ablation model of targets irradiated by pulsed laser is established. By using the simple energy balance conditions, the relationship between ablation surface location and time is derived. By an adiabatic approximation, the continuous-temperature condition, energy conservation and all boundary conditions can be established. By applying the analytical method and integral-approximation method, the solid and liquid phase temperature distributions are obtained and found to be a function of time and location. The interface of solid and liquid phase is also derived. The results are compared with the other published data. In addition, the dynamics process of pulsed laser deposition of KTN (Kta0.65Nb0.35O3) thin film is simulated in detail by using fluid dynamics theory. By combining the expression of the target ablation ratio and the dynamic equation and by using the experimental data, the effects of laser action parameters on the thickness distribution of thin film and on the thin film component characteristics are discussed. The results are in good agreement with the experimental data. 展开更多
关键词 ablation ratio KTN thin film PLASMA pulsed laser deposition (PLD)
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Thin Films Fabricated by Pulsed Laser Deposition for Electrocatalysis 被引量:2
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作者 Hainan Sun Hyunseung Kim +3 位作者 Xiaomin Xu Liangshuang Fei WooChul Jung Zongping Shao 《Renewables》 2023年第1期21-38,共18页
Advances in energy conversion and storage technologies,such as water electrolyzers,rechargeable metal-air batteries,and fuel cells,have enabled a renewable and sustainable future.The efficiency and effectiveness of th... Advances in energy conversion and storage technologies,such as water electrolyzers,rechargeable metal-air batteries,and fuel cells,have enabled a renewable and sustainable future.The efficiency and effectiveness of these technologies largely relies on the physicochemical properties of the functional materials used,specifically electrocatalysts.Pulsed laser deposition(PLD)is a powerful technique for the synthesis of thin film materials,offering a unique platform for understanding electrochemical reaction mechanisms and searching for low-cost and high-performance electrocatalysts.In this mini-review,we present the latest studies in which thin film materials(mainly focused on perovskite oxide thin films)via PLD have been actively utilized in the field of electrocatalysis.The fundamentals and advantages of PLD in the synthesis of thin films are discussed first.Then,emerging types of thin films associated with electrochemical applications are presented.Special emphasis is placed on material design methods to reveal the reaction mechanisms and establish the structure–performance relationships by understanding structural variations in precatalysts and surface reconstruction under reaction conditions.Finally,we discuss remaining challenges and future perspectives. 展开更多
关键词 pulsed laser deposition thin film materials ELECTROCATALYSIS reaction mechanism
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Multifunctional hopeite nanocoating on Ti64 substrates by pulsed laser deposition and radio frequency magnetron sputtering for orthopedic implant applications:A comparative study 被引量:3
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作者 Ashish DAS Mukul SHUKLA 《Journal of Central South University》 SCIE EI CAS CSCD 2020年第8期2198-2209,共12页
Functionalized implants demonstrate an upgraded approach in orthopedic implants,aiming to achieve long term success through improved bio integration.Bioceramic coatings with multifunctionality have arisen as an effect... Functionalized implants demonstrate an upgraded approach in orthopedic implants,aiming to achieve long term success through improved bio integration.Bioceramic coatings with multifunctionality have arisen as an effective substitute for conventional coatings,owing to their combination of various properties that are essential for bio-implants,such as osteointegration and antibacterial character.In the present study,thin hopeite coatings were produced by Pulsed laser deposition(PLD)and radio frequency magnetron sputtering(RFMS)on Ti64 substrates.The obtained hopeite coatings were annealed at 500°C in ambient air and studied in terms of surface morphology,phase composition,surface roughness,adhesion strength,antibacterial efficacy,apatite forming ability,and surface wettability by scanning electron microscope(SEM),X-ray diffraction(XRD),atomic force microscope(AFM),tensometer,fluorescence-activated cell sorting(FACS),simulated body fluid(SBF)immersion test and contact angle goniometer,respectively.Furthermore,based on promising results obtained in the present work it can be summarized that the new generation multifunctional hopeite coating synthesized by two alternative new process routes of PLD and RFMS on Ti64 substrates,provides effective alternatives to conventional coatings,largely attributed to strong osteointegration and antibacterial character of deposited hopeite coating ensuring the overall stability of metallic orthopedic implants. 展开更多
关键词 hopeite Ti64 alloy pulsed laser deposition magnetron sputtering coating IMPLANT
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Visible photoluminescence from ZnO/diamond-like carbon thin films 被引量:3
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作者 张立春 李清山 +1 位作者 董艳锋 马自侠 《Optoelectronics Letters》 EI 2012年第2期113-116,共4页
ZnO/diamond-like carbon (DLC) thin films are deposited by pulsed laser deposition (PLD) on Si (111) wafer. Visible room-temperature photoluminescence (PL) is observed from ZnO/DLC thin films by fluorescence spectropho... ZnO/diamond-like carbon (DLC) thin films are deposited by pulsed laser deposition (PLD) on Si (111) wafer. Visible room-temperature photoluminescence (PL) is observed from ZnO/DLC thin films by fluorescence spectrophotometer. The Gaussian curve fitting of PL spectra reveals that the broadband visible emission contains three components with λ=508 nm, 554 nm and 698 nm. The origin and possible mechanism of the visible PL are discussed, and they can be attributed to the PL recombination of ZnO and DLC thin films. 展开更多
关键词 pulsed laser deposition Silicon wafers Zinc oxide
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Optical properties of ZnO thin films grown on diamond-like carbon by pulsed laser deposition 被引量:3
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作者 李少兰 张立春 +1 位作者 董艳锋 赵风周 《Optoelectronics Letters》 EI 2012年第6期445-448,共4页
ZnO/diamond-like carbon(DLC)thin films are deposited by pulsed laser deposition(PLD),and the room-temperature photoluminescence(PL)is investigated.Using a fluorescence spectrophotometer,we obtain the PL spectra of DLC... ZnO/diamond-like carbon(DLC)thin films are deposited by pulsed laser deposition(PLD),and the room-temperature photoluminescence(PL)is investigated.Using a fluorescence spectrophotometer,we obtain the PL spectra of DLC/Si and ZnO/Si thin films deposited at different substrate temperatures.The ZnO/DLC thin films show a broadband emission almost containing the entire visible spectrum.The Gaussian fitting curves of PL spectra reveal that the visible emission of ZnO/DLC thin films consists of three peaks centered at 381 nm,526 nm and 682 nm,which are attributed to the radiative recombination of ZnO and DLC,respectively.The Commission International de l,Eclairage(CIE)1931(x,y)chromaticity space of ZnO/DLC thin films indicates that the visible PL spectrum is very close to the standard white-light region. 展开更多
关键词 CARBON Curve fitting DEPOSITS LASERS Optical properties pulsed laser deposition Zinc oxide
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Laser-assisted deposition of Cu bumps for microelectronic packaging 被引量:1
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作者 Won-Seok CHOI Joohan KIM 《中国有色金属学会会刊:英文版》 CSCD 2012年第S3期683-687,共5页
Cu bump was transferred using a focused laser pulse for microelectronic packaging.An Nd:YAG laser pulse (maximum energy of 500 mJ;wavelength of 1064 nm;fluences of 0.4-2.1 kJ/cm2) was irradiated on a sacrificial absor... Cu bump was transferred using a focused laser pulse for microelectronic packaging.An Nd:YAG laser pulse (maximum energy of 500 mJ;wavelength of 1064 nm;fluences of 0.4-2.1 kJ/cm2) was irradiated on a sacrificial absorption layer with copper coating.The focused laser beam induced plasma between the semi-transparent donor slide and the sacrificial layer,causing a shock wave.The shock wave pressure pushed the Cu layer and transferred material to deposit a bump on substrate.A beam-shaper was used to produce uniform pressure at the interface to reduce fragmentation of the transferred material on the substrate.The calculated shock wave pressure with respect to laser fluence was 1-3 GPa.A Cu bump of diameter of 200 μm was successfully deposited at laser fluence of 0.6 kJ/cm 2.The pressure control at the sacrificial layer using a laser pulse was critical to produce a bump with less fragmentation.The technique can be applied to forming Cu bump for an interconnecting process in electronics. 展开更多
关键词 LASER induced FORWARD transfer BUMP deposition ND:YAG pulsed LASER micro system packaging beam SHAPING
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High-Throughput Multi-Plume Pulsed-Laser Deposition for Materials Exploration and Optimization 被引量:2
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作者 Samuel S.Mao Xiaojun Zhang 《Engineering》 SCIE EI 2015年第3期367-371,共5页
A high-throughput multi-plume pulsed-laser deposition (MPPLD) system has been demonstrated and compared to previous techniques. Whereas most combinatorial pulsedlaser deposition (PLD) systems have focused on achie... A high-throughput multi-plume pulsed-laser deposition (MPPLD) system has been demonstrated and compared to previous techniques. Whereas most combinatorial pulsedlaser deposition (PLD) systems have focused on achieving thickness uniformity using sequential multilayer deposition and masking followed by post-deposition annealing, MPPLD directly deposits a compositionally varied library of compounds using the directionality of PLD plumes and the resulting spatial variations of deposition rate. This system is more suitable for high-throughput compound thin-film fabrication. 展开更多
关键词 pulsed-laser deposition HIGH-THROUGHPUT
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Comparison on Morphological and Optical Properties of TiO_(2) Thin Films Grown by Single-Pulse and Multi-Pulse Laser Ablation 被引量:2
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作者 Yonic Penaloza-Mendoza Luis Ponce-Cabrera 《Journal of Surface Engineered Materials and Advanced Technology》 2015年第1期17-23,共7页
TiO2 thin films were prepared on glass substrates using the PLD (Pulsed Laser Deposition) technique. In order to carry out the ablation process, a Nd:YAG laser was used emitting in 1064 nm wavelength at 10 Hz repetiti... TiO2 thin films were prepared on glass substrates using the PLD (Pulsed Laser Deposition) technique. In order to carry out the ablation process, a Nd:YAG laser was used emitting in 1064 nm wavelength at 10 Hz repetition rate, set up for operating in both single-pulse and multi-pulse regimes. A comparison of the deposition rate, the optical and morphological properties of the layers obtained from both ablation regimes was made, which showed that the multi-pulsed ablation produced layers with a higher surface quality and better optical properties. 展开更多
关键词 pulsed Laser deposition Single-pulse Ablation Multi-pulse Ablation TiO_(2) Thin Film
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Epitaxial growth ofβ-Ga_(2)O_(3)thin films on Ga_(2)O_(3)and Al_(2)O_(3)substrates by using pulsed laser deposition 被引量:2
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作者 Yuxin An Liyan Dai +9 位作者 Ying Wu Biao Wu Yanfei Zhao Tong Liu Hui Hao Zhengcheng Li Gang Niu Jinping Zhang Zhiyong Quan Sunan Dingy 《Journal of Advanced Dielectrics》 CAS 2019年第4期47-53,共7页
In this work,we have successfully grown high quality epitaxialβ-Ga_(2)O_(3)thin films onβ-Ga_(2)O_(3)(100)and Al_(2)O_(3)(0001)substrates using pulsed laser deposition(PLD).By optimizing temperature and oxygen press... In this work,we have successfully grown high quality epitaxialβ-Ga_(2)O_(3)thin films onβ-Ga_(2)O_(3)(100)and Al_(2)O_(3)(0001)substrates using pulsed laser deposition(PLD).By optimizing temperature and oxygen pressure,the best conditions were found to be 650-700℃and 0.5 Pa.To further improve the quality of hetero-epitaxialβ-Ga_(2)O_(3),the sapphire substrates were pretreated for atomic terraced surface by chemical cleaning and high temperature annealing.From the optical transmittance measurements,the films grown at 600-750℃exhibit a clear absorption edge at deep ultraviolet region around 250-275 nm wavelength.High resolution transmission electron microscope(HRTEM)images and X-ray diffraction(XRD)patterns demonstrate thatβ-Ga_(2)O_(3)(-201)//Al_(2)O_(3)(0001)epitaxial texture dominated the epitaxial oxide films on sapphire substrate,which opens up the possibilities of high power electric devices. 展开更多
关键词 Oxide semiconductor β-Ga_(2)O_(3)epitaxy optical transmission spectrum pulsed laser deposition crystal growth
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