A macro-micro dual-drive positioning system showing good potential for high acceleration and high precision positioning required in IC packaging applications is devised in this paper. The dual-drive positioning stage ...A macro-micro dual-drive positioning system showing good potential for high acceleration and high precision positioning required in IC packaging applications is devised in this paper. The dual-drive positioning stage uses a VCM (voice coil motor) driven macro positioning stage and a PZT piezo-electric driven micro positioning stage. The coupling characteristics of the system are analyzed to produce a control structure with a micro positioning stage that can dynamically compensate for the positioning error produced by the macro positioning stage. Models of the two positioning stages are described. The models cover both the mechanism and the actuator. For the macro positioning stage, friction characteristics are taken into account, and a controller with an LQG (linear-quadratic-Gaussian) control algorithm combining a feed-forward compensation algorithm is derived. A PID controller is used to control the micro positioning stage. Detailed designs are derived for the proposed approach, and the performance is validated by simulation.展开更多
In this paper, a composite control scheme for macro-micro dual-drive positioning stage with high accel- eration and high precision is proposed. The objective of control is to improve the precision by reducing the infl...In this paper, a composite control scheme for macro-micro dual-drive positioning stage with high accel- eration and high precision is proposed. The objective of control is to improve the precision by reducing the influence of system vibration and external noise. The positioning stage is composed of voice coil motor （VCM） as macro driver and piezoelectric actuator （PEA） as micro driver. The precision of the macro drive positioning stage is improved by the com- bined PID control with adaptive Kalman filter （AKF）. AKF is used to compensate VCM vibration （as the virtual noise） and the external noise. The control scheme of the micro drive positioning stage is presented as the integrated one with PID and intelligent adaptive inverse control approach to compensate the positioning error caused by macro drive positioning stage. A dynamic recurrent neural networks （DRNN） based inverse control approach is proposed to offset the hysteresis nonlinearity of PEA. Simulations show the positioning precision of macro-micro dual-drive stage is clearly improved via the proposed control scheme.展开更多
基金Supported by the National Natural Science Foundation of China(Grant No.50705027)the National High Technology Research and Development Program of China("863"Program)(Grant No.2007AA04Z315)Self-Planned Task of State Key Laboratory of Robotics and System(HIT)(Grant No.SKLRS200804B)
文摘A macro-micro dual-drive positioning system showing good potential for high acceleration and high precision positioning required in IC packaging applications is devised in this paper. The dual-drive positioning stage uses a VCM (voice coil motor) driven macro positioning stage and a PZT piezo-electric driven micro positioning stage. The coupling characteristics of the system are analyzed to produce a control structure with a micro positioning stage that can dynamically compensate for the positioning error produced by the macro positioning stage. Models of the two positioning stages are described. The models cover both the mechanism and the actuator. For the macro positioning stage, friction characteristics are taken into account, and a controller with an LQG (linear-quadratic-Gaussian) control algorithm combining a feed-forward compensation algorithm is derived. A PID controller is used to control the micro positioning stage. Detailed designs are derived for the proposed approach, and the performance is validated by simulation.
基金partly supported by the National Natural Science Foundation of China(No.61174047)the School Basic Foundation of Northwestern Polytechnical University(No.GCKYI006)the Fundamental Research Funds for the Central Universities(No.HEUCFR1214)
文摘In this paper, a composite control scheme for macro-micro dual-drive positioning stage with high accel- eration and high precision is proposed. The objective of control is to improve the precision by reducing the influence of system vibration and external noise. The positioning stage is composed of voice coil motor （VCM） as macro driver and piezoelectric actuator （PEA） as micro driver. The precision of the macro drive positioning stage is improved by the com- bined PID control with adaptive Kalman filter （AKF）. AKF is used to compensate VCM vibration （as the virtual noise） and the external noise. The control scheme of the micro drive positioning stage is presented as the integrated one with PID and intelligent adaptive inverse control approach to compensate the positioning error caused by macro drive positioning stage. A dynamic recurrent neural networks （DRNN） based inverse control approach is proposed to offset the hysteresis nonlinearity of PEA. Simulations show the positioning precision of macro-micro dual-drive stage is clearly improved via the proposed control scheme.
