Modern three-dimensional nanofabrication requires both additive and subtractive processes.However,both processes are largely isolated and generally regarded as incompatible with each other.In this study,we developed s...Modern three-dimensional nanofabrication requires both additive and subtractive processes.However,both processes are largely isolated and generally regarded as incompatible with each other.In this study,we developed simultaneous additive and subtractive fabrication processes using two-photon polymerization followed by femtosecond(fs)laser multiphoton ablation.To demonstrate the new capability,submicrometer polymer fibers containing periodic holes of 500-nm diameter and microfluidic channels of 1-mm diameter were successfully fabricated.This method combining both two-photon polymerization and fs laser ablation improves the nanofabrication efficiency and enables the fabrication of complex three-dimensional micro-/nanostructures,promising for a wide range of applications in integrated optics,microfluidics and microelectromechanical systems.展开更多
与光子和电子不同,原子的激发亚稳态具有方便操作的内能态结构,这使利用内能态的光学淬灭原理实现光刻技术成为现实.基于原子光学的中性原子束光刻技术是下一代光刻技术(the next generation lithography,NGL)的一种,它可分两种途径实现...与光子和电子不同,原子的激发亚稳态具有方便操作的内能态结构,这使利用内能态的光学淬灭原理实现光刻技术成为现实.基于原子光学的中性原子束光刻技术是下一代光刻技术(the next generation lithography,NGL)的一种,它可分两种途径实现:激光驻波原子直沉积技术和亚稳态中性原子光刻技术.前者可以实现图案的纳米尺度特征、大面积平行沉积和高分辨率;后者结合有效的抗蚀剂,同样可以实现纳米图形制造,在基板上获得的尖锐边缘分辨率目前可达40nm.两种途径的原理相差甚远,但最终获得的结果相似.展开更多
Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modem nanoscience and technology and becomes critically important for numerous emerging ...Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modem nanoscience and technology and becomes critically important for numerous emerging technologies such as nanoelectronics, nanopho- tonics and micro/nanoelectromechanical systems. This review systematically explores the non-conventional material processing approaches in fabricating nanomaterials and micro/nanostructures of various dimensions which are challenging to be fabricated via conventional approaches. Research efforts are focused on laser-based techniques for the growth and fabrication of one-dimensional （1D）, two-dimensional （2D） and three-dimensional （3D） nanomaterials and micro/nanostructures. The following research topics are covered, including： 1） laser-assisted chemical vapor deposition （CVD） for highly efficient growth and integration of 1D nanomaterial of carbon nanotubes （CNTs）, 2） laser direct writing （LDW） of graphene ribbons under ambient conditions, and 3） LDW of 3D micro/nanostructures via additive and subtractive processes. Comparing with the conventional fabrication methods, the laser-based methods exhibit several unique advantages in the micro/nanofabrication of advanced functional materials and structures. For the 1D CNT growth, the laser-assisted CVD process can realize both rapid material synthesis and tight control of growth location and orientation of CNTs due to the highly intense energy delivery and laser-induced optical near-field effects. For the 2D graphene synthesis and patterning, roomtemperature and open-air fabrication of large-scale graphene patterns on dielectric surface has been successfully realized by a LDW process. For the 3D micro/nanofabrica- tion, the combination of additive two-photon polymeriza- tion （TPP） and subtractive multi-photon ablation （MPA） processes enables the fabrication of arbitrary complex 3D micro/nanostructures which tional fabrication methods are challenging for conven- Consideri展开更多
Controllable fabrication of surface micro/nano structures is the key to realizing surface functionalization for various applications.As a versatile approach,ultrafast laser ablation has been widely studied for surface...Controllable fabrication of surface micro/nano structures is the key to realizing surface functionalization for various applications.As a versatile approach,ultrafast laser ablation has been widely studied for surface micro/nano structuring.Increasing research eforts in this feld have been devoted to gaining more control over the fabrication processes to meet the increasing need for creation of complex structures.In this paper,we focus on the in-situ deposition process following the plasma formation under ultrafast laser ablation.From an overview perspective,we frstly summarize the diferent roles that plasma plumes,from pulsed laser ablation of solids,play in diferent laser processing approaches.Then,the distinctive in-situ deposition process within surface micro/nano structuring is highlighted.Our experimental work demonstrated that the in-situ deposition during ultrafast laser surface structuring can be controlled as a localized micro-additive process to pile up secondary ordered structures,through which a unique kind of hierarchical structure with fort-like bodies sitting on top of micro cone arrays were fabricated as a showcase.The revealed laser-matter interaction mechanism can be inspiring for the development of new ultrafast laser fabrication approaches,adding a new dimension and more fexibility in controlling the fabrication of functional surface micro/nano structures.展开更多
基金This research work was financially supported by National Science Foundation(CMMI 0900419 and 0758199)National Natural Science Foundation of China(grant no.90923039)。
文摘Modern three-dimensional nanofabrication requires both additive and subtractive processes.However,both processes are largely isolated and generally regarded as incompatible with each other.In this study,we developed simultaneous additive and subtractive fabrication processes using two-photon polymerization followed by femtosecond(fs)laser multiphoton ablation.To demonstrate the new capability,submicrometer polymer fibers containing periodic holes of 500-nm diameter and microfluidic channels of 1-mm diameter were successfully fabricated.This method combining both two-photon polymerization and fs laser ablation improves the nanofabrication efficiency and enables the fabrication of complex three-dimensional micro-/nanostructures,promising for a wide range of applications in integrated optics,microfluidics and microelectromechanical systems.
文摘与光子和电子不同,原子的激发亚稳态具有方便操作的内能态结构,这使利用内能态的光学淬灭原理实现光刻技术成为现实.基于原子光学的中性原子束光刻技术是下一代光刻技术(the next generation lithography,NGL)的一种,它可分两种途径实现:激光驻波原子直沉积技术和亚稳态中性原子光刻技术.前者可以实现图案的纳米尺度特征、大面积平行沉积和高分辨率;后者结合有效的抗蚀剂,同样可以实现纳米图形制造,在基板上获得的尖锐边缘分辨率目前可达40nm.两种途径的原理相差甚远,但最终获得的结果相似.
文摘Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modem nanoscience and technology and becomes critically important for numerous emerging technologies such as nanoelectronics, nanopho- tonics and micro/nanoelectromechanical systems. This review systematically explores the non-conventional material processing approaches in fabricating nanomaterials and micro/nanostructures of various dimensions which are challenging to be fabricated via conventional approaches. Research efforts are focused on laser-based techniques for the growth and fabrication of one-dimensional （1D）, two-dimensional （2D） and three-dimensional （3D） nanomaterials and micro/nanostructures. The following research topics are covered, including： 1） laser-assisted chemical vapor deposition （CVD） for highly efficient growth and integration of 1D nanomaterial of carbon nanotubes （CNTs）, 2） laser direct writing （LDW） of graphene ribbons under ambient conditions, and 3） LDW of 3D micro/nanostructures via additive and subtractive processes. Comparing with the conventional fabrication methods, the laser-based methods exhibit several unique advantages in the micro/nanofabrication of advanced functional materials and structures. For the 1D CNT growth, the laser-assisted CVD process can realize both rapid material synthesis and tight control of growth location and orientation of CNTs due to the highly intense energy delivery and laser-induced optical near-field effects. For the 2D graphene synthesis and patterning, roomtemperature and open-air fabrication of large-scale graphene patterns on dielectric surface has been successfully realized by a LDW process. For the 3D micro/nanofabrica- tion, the combination of additive two-photon polymeriza- tion （TPP） and subtractive multi-photon ablation （MPA） processes enables the fabrication of arbitrary complex 3D micro/nanostructures which tional fabrication methods are challenging for conven- Consideri
基金support by the National Key Research and Development Program of China(No.2017YFB1104300)the National Natural Science Foundation of China(Nos.51575309 and 51210009)the Tsinghua University Initiative Scientifc Research Program(No.2018Z05JZY009).
文摘Controllable fabrication of surface micro/nano structures is the key to realizing surface functionalization for various applications.As a versatile approach,ultrafast laser ablation has been widely studied for surface micro/nano structuring.Increasing research eforts in this feld have been devoted to gaining more control over the fabrication processes to meet the increasing need for creation of complex structures.In this paper,we focus on the in-situ deposition process following the plasma formation under ultrafast laser ablation.From an overview perspective,we frstly summarize the diferent roles that plasma plumes,from pulsed laser ablation of solids,play in diferent laser processing approaches.Then,the distinctive in-situ deposition process within surface micro/nano structuring is highlighted.Our experimental work demonstrated that the in-situ deposition during ultrafast laser surface structuring can be controlled as a localized micro-additive process to pile up secondary ordered structures,through which a unique kind of hierarchical structure with fort-like bodies sitting on top of micro cone arrays were fabricated as a showcase.The revealed laser-matter interaction mechanism can be inspiring for the development of new ultrafast laser fabrication approaches,adding a new dimension and more fexibility in controlling the fabrication of functional surface micro/nano structures.
