With the wide application of laser in the field of skin plastic surgery, micro laser galvanometer scanner has made great progress in this field with its portability. However, the measurement method used to measure the...With the wide application of laser in the field of skin plastic surgery, micro laser galvanometer scanner has made great progress in this field with its portability. However, the measurement method used to measure the deflection angle of laser galvanometer in the narrow space of scanner with high precision remains to be studied. In this paper, an angle measurement method based on magnetic field is proposed, and the effect of the shapes of permanent magnets(PMs) on the measurement is studied by theoretical and experimental study under the condition that the maximum available space for the PMs is a 10 mm side cube. An angle measuring experimental device is set up, and the contrast experiment is carried out with different PMs which are the same as simulation. The experimental results show that cylindrical PM is more suitable than other PMs, which is consistent with the simulation results, and the maximum nonlinearity error is 0.562%. This method has the advantages of small volume,non-contact measurement, small moment of inertia, good dynamic response and no external excitation for the PMs, so it has a broad application prospect in micro laser galvanometer scanner.展开更多
State-of-the-art commercially available 3D laser micro-and nanoprinters using polymeric photoresists based on two-or multi-photon absorption rely on high-power pico-or femtosecond lasers,leading to fairly large and ex...State-of-the-art commercially available 3D laser micro-and nanoprinters using polymeric photoresists based on two-or multi-photon absorption rely on high-power pico-or femtosecond lasers,leading to fairly large and expensive instruments.Lately,we have introduced photoresists based on two-step absorption instead of two-photon absorption,allowing for the use of small and inexpensive continuous-wave 405 nm wavelength GaN semiconductor laser diodes with light-output powers below 1 mW.Here,using the identical photoresist system and similar laser diodes,we report on the design,construction,and characterization of a 3D laser nanoprinter that fits into a shoe box.This shoe box contains all optical components,namely the mounted laser,the collimation-and beam-shaping optics,a miniature MEMS xy-scanner,a tube lens,the focusing microscope objective lens(NA=1.4,100×magnification),a piezo slip-stick z-stage,the sample holder,a camera monitoring system,LED sample illumination,as well as the miniaturized control electronics employing a microcontroller.We present a gallery of example 3D structures printed with this instrument.We achieve about 100 nm lateral spatial resolution and focus scan speeds of about 1 mm/s.Potentially,our shoe-box-sized system can be made orders of magnitude less expensive than today’s commercial systems.展开更多
基金supported by the Aeronautical Science Foundation of China [grant numbers 20175748009]。
文摘With the wide application of laser in the field of skin plastic surgery, micro laser galvanometer scanner has made great progress in this field with its portability. However, the measurement method used to measure the deflection angle of laser galvanometer in the narrow space of scanner with high precision remains to be studied. In this paper, an angle measurement method based on magnetic field is proposed, and the effect of the shapes of permanent magnets(PMs) on the measurement is studied by theoretical and experimental study under the condition that the maximum available space for the PMs is a 10 mm side cube. An angle measuring experimental device is set up, and the contrast experiment is carried out with different PMs which are the same as simulation. The experimental results show that cylindrical PM is more suitable than other PMs, which is consistent with the simulation results, and the maximum nonlinearity error is 0.562%. This method has the advantages of small volume,non-contact measurement, small moment of inertia, good dynamic response and no external excitation for the PMs, so it has a broad application prospect in micro laser galvanometer scanner.
基金We thank Vincent Hahn,Michael Thiel(Nanoscribe),and Matthias Blaicher(Nanoscribe)for discussions.We acknowledge funding by the Deutsche Forschungsgemeinschaft(DFG,German Research Foundation)under Germany’s Excellence Strategy for the Excellence Cluster“3D Matter Made to Order”(2082/1-390761711)by the Carl Zeiss Foundation,by the Helmholtz program“Science and Technology of Nanosystems”,by the Karlsruhe School of Optics and Photonics(KSOP),by the Max Planck School of Photonics(MPSP)by Nanoscribe-A BICO company.
文摘State-of-the-art commercially available 3D laser micro-and nanoprinters using polymeric photoresists based on two-or multi-photon absorption rely on high-power pico-or femtosecond lasers,leading to fairly large and expensive instruments.Lately,we have introduced photoresists based on two-step absorption instead of two-photon absorption,allowing for the use of small and inexpensive continuous-wave 405 nm wavelength GaN semiconductor laser diodes with light-output powers below 1 mW.Here,using the identical photoresist system and similar laser diodes,we report on the design,construction,and characterization of a 3D laser nanoprinter that fits into a shoe box.This shoe box contains all optical components,namely the mounted laser,the collimation-and beam-shaping optics,a miniature MEMS xy-scanner,a tube lens,the focusing microscope objective lens(NA=1.4,100×magnification),a piezo slip-stick z-stage,the sample holder,a camera monitoring system,LED sample illumination,as well as the miniaturized control electronics employing a microcontroller.We present a gallery of example 3D structures printed with this instrument.We achieve about 100 nm lateral spatial resolution and focus scan speeds of about 1 mm/s.Potentially,our shoe-box-sized system can be made orders of magnitude less expensive than today’s commercial systems.
