Study of the quantum size confinement effect has attracted much attention since the first observation of visible photoluminescence (PL) from porous silicon at room temperature. Recently great interest has risen in nan...Study of the quantum size confinement effect has attracted much attention since the first observation of visible photoluminescence (PL) from porous silicon at room temperature. Recently great interest has risen in nanometer silicon films, because the porous silicon of loosened structure is found difficult to be used in optoelectronic function. A blue/green photoluminescence has been observed from Si thin film with nanostructures prepared by α-Si: H after rapid thermal annealing (RTA) treatments by Zhu et al. But evolution of the hydrogen from as-deposited α-Si:H film by RTA tends to break the thin films into pieces easily.展开更多
文摘Study of the quantum size confinement effect has attracted much attention since the first observation of visible photoluminescence (PL) from porous silicon at room temperature. Recently great interest has risen in nanometer silicon films, because the porous silicon of loosened structure is found difficult to be used in optoelectronic function. A blue/green photoluminescence has been observed from Si thin film with nanostructures prepared by α-Si: H after rapid thermal annealing (RTA) treatments by Zhu et al. But evolution of the hydrogen from as-deposited α-Si:H film by RTA tends to break the thin films into pieces easily.
