Trench sidewall passivation is a key step in the SCREAM (single crystal reactive etching and metallization) process for releasing suspended MEMS structures. In this paper, the parylene thin film is reported to serve a...Trench sidewall passivation is a key step in the SCREAM (single crystal reactive etching and metallization) process for releasing suspended MEMS structures. In this paper, the parylene thin film is reported to serve as the passivation layer owing to its excellent conformality, chemical inertness, mechanical performance, and especially, low growth temperature. The deposited parylene films are characterized and the test structures are released through SCREAM process utilizing the parylene films as a passivation layer. The results show that as a passivation layer the parylene has more merits than the PECVD SiO2 film.展开更多
汽车在刹车过程中,由于制动盘受摩擦片挤压产生刺耳的尖叫、引起共振,从而影响整车的舒适性能。为了降低制动噪声和消除共振,可以通过测量实车状态下制动器频谱数据,并进行结构的模态分析及台架制动噪声试验,找到其噪声产生的频率范围...汽车在刹车过程中,由于制动盘受摩擦片挤压产生刺耳的尖叫、引起共振,从而影响整车的舒适性能。为了降低制动噪声和消除共振,可以通过测量实车状态下制动器频谱数据,并进行结构的模态分析及台架制动噪声试验,找到其噪声产生的频率范围和共振点。文章论述了汽车制动噪声的产生、分类和影响因素。通过优化制动器结构、合理匹配摩擦衬片和摩擦材料以及改变卡钳钳体固有频率,将大于70 d B的噪声出现频率控制在≤10%,大于80 d B的噪声出现频率控制在≤5%,达到降低和消除噪声的目的。展开更多
基金Supported by the National Natural Science Foundation of China (Grant No.9060704)National Basic Research Program of China (Grant No.2006AA04Z315)
文摘Trench sidewall passivation is a key step in the SCREAM (single crystal reactive etching and metallization) process for releasing suspended MEMS structures. In this paper, the parylene thin film is reported to serve as the passivation layer owing to its excellent conformality, chemical inertness, mechanical performance, and especially, low growth temperature. The deposited parylene films are characterized and the test structures are released through SCREAM process utilizing the parylene films as a passivation layer. The results show that as a passivation layer the parylene has more merits than the PECVD SiO2 film.
文摘汽车在刹车过程中,由于制动盘受摩擦片挤压产生刺耳的尖叫、引起共振,从而影响整车的舒适性能。为了降低制动噪声和消除共振,可以通过测量实车状态下制动器频谱数据,并进行结构的模态分析及台架制动噪声试验,找到其噪声产生的频率范围和共振点。文章论述了汽车制动噪声的产生、分类和影响因素。通过优化制动器结构、合理匹配摩擦衬片和摩擦材料以及改变卡钳钳体固有频率,将大于70 d B的噪声出现频率控制在≤10%,大于80 d B的噪声出现频率控制在≤5%,达到降低和消除噪声的目的。
