The mathematical model of the three-dimensional semiconductor devices of heat conduction is described by a system of four quasilinear partial differential equations for initial boundary value problem. One equation in ...The mathematical model of the three-dimensional semiconductor devices of heat conduction is described by a system of four quasilinear partial differential equations for initial boundary value problem. One equation in elliptic form is for the electric potential; two equations of convection-dominated diffusion type are for the electron and hole concentration; and one heat conduction equation is for temperature. Characteristic finite difference schemes for two kinds of boundary value problems are put forward. By using the thick and thin grids to form a complete set and treating the product threefold-quadratic interpolation, variable time step method with the boundary condition, calculus of variations and the theory of prior estimates and techniques, the optimal error estimates in L2 norm are derived in the approximate solutions.展开更多
采用液态源扩散法制备了双向型瞬变电压抑制二极管(Transient Voltage Suppressor Diode,简称TVS)器件。研究了扩散温度、扩散时间、电阻率、钝化保护等工艺参数对TVS器件电性能的影响。扩散温度、扩散时间的增加将使扩散结的结深增加;...采用液态源扩散法制备了双向型瞬变电压抑制二极管(Transient Voltage Suppressor Diode,简称TVS)器件。研究了扩散温度、扩散时间、电阻率、钝化保护等工艺参数对TVS器件电性能的影响。扩散温度、扩散时间的增加将使扩散结的结深增加;电阻率的提高及结深的增加,将使TVS器件的雪崩击穿电压增大;合适的钝化保护方法将有助于减小器件的反向漏电流。给出了电压和扩散时间之间的经验估算公式,该公式可用来指导得到希望的TVS目标电压档。据验算,该公式的误差在10%以内。展开更多
基金Project supported by the National Scaling Program,the National Eighth-Five Year Tackling Key Problems Program and the Doctoral Found of the National Education Commission.
文摘The mathematical model of the three-dimensional semiconductor devices of heat conduction is described by a system of four quasilinear partial differential equations for initial boundary value problem. One equation in elliptic form is for the electric potential; two equations of convection-dominated diffusion type are for the electron and hole concentration; and one heat conduction equation is for temperature. Characteristic finite difference schemes for two kinds of boundary value problems are put forward. By using the thick and thin grids to form a complete set and treating the product threefold-quadratic interpolation, variable time step method with the boundary condition, calculus of variations and the theory of prior estimates and techniques, the optimal error estimates in L2 norm are derived in the approximate solutions.
文摘采用液态源扩散法制备了双向型瞬变电压抑制二极管(Transient Voltage Suppressor Diode,简称TVS)器件。研究了扩散温度、扩散时间、电阻率、钝化保护等工艺参数对TVS器件电性能的影响。扩散温度、扩散时间的增加将使扩散结的结深增加;电阻率的提高及结深的增加,将使TVS器件的雪崩击穿电压增大;合适的钝化保护方法将有助于减小器件的反向漏电流。给出了电压和扩散时间之间的经验估算公式,该公式可用来指导得到希望的TVS目标电压档。据验算,该公式的误差在10%以内。
