Based on Multi-Masking Empirical Mode Decomposition (MMEMD) and fuzzy c-means (FCM) clustering, a new method of wind turbine bearing fault diagnosis FCM-MMEMD is proposed, which can determine the fault accurately and ...Based on Multi-Masking Empirical Mode Decomposition (MMEMD) and fuzzy c-means (FCM) clustering, a new method of wind turbine bearing fault diagnosis FCM-MMEMD is proposed, which can determine the fault accurately and timely. First, FCM clustering is employed to classify the data into different clusters, which helps to estimate whether there is a fault and how many fault types there are. If fault signals exist, the fault vibration signals are then demodulated and decomposed into different frequency bands by MMEMD in order to be analyzed further. In order to overcome the mode mixing defect of empirical mode decomposition (EMD), a novel method called MMEMD is proposed. It is an improvement to masking empirical mode decomposition (MEMD). By adding multi-masking signals to the signals to be decomposed in different levels, it can restrain low-frequency components from mixing in highfrequency components effectively in the sifting process and then suppress the mode mixing. It has the advantages of easy implementation and strong ability of suppressing modal mixing. The fault type is determined by Hilbert envelope finally. The results of simulation signal decomposition showed the high performance of MMEMD. Experiments of bearing fault diagnosis in wind turbine bearing fault diagnosis proved the validity and high accuracy of the new method.展开更多
本文提出了一种新颖的MEMS多掩膜工艺,实现了带有大台阶和大深宽比窄槽的衬底上的体硅精细加工。通过薄胶多次光刻在衬底上制作出氧化硅(SiO2)、氮化硅(Si3N4)、光刻胶(photo-resist,PR)等材料的多层掩膜图形,每层掩膜可以进行一次衬底...本文提出了一种新颖的MEMS多掩膜工艺,实现了带有大台阶和大深宽比窄槽的衬底上的体硅精细加工。通过薄胶多次光刻在衬底上制作出氧化硅(SiO2)、氮化硅(Si3N4)、光刻胶(photo-resist,PR)等材料的多层掩膜图形,每层掩膜可以进行一次衬底刻蚀或腐蚀,刻蚀或腐蚀完毕后去除该层掩膜。该工艺解决了MEMS工艺中的深坑涂胶和光刻问题,结合深反应离子刻蚀(Deep Re-active Ion Etching,DR IE)、湿法腐蚀等工艺可以用于多级台阶、深坑底部精细结构、微结构释放等MEMS工艺。展开更多
基金Supported by National Key R&D Projects(Grant No.2018YFB0905500)National Natural Science Foundation of China(Grant No.51875498)+1 种基金Hebei Provincial Natural Science Foundation of China(Grant Nos.E2018203439,E2018203339,F2016203496)Key Scientific Research Projects Plan of Henan Higher Education Institutions(Grant No.19B460001)
文摘Based on Multi-Masking Empirical Mode Decomposition (MMEMD) and fuzzy c-means (FCM) clustering, a new method of wind turbine bearing fault diagnosis FCM-MMEMD is proposed, which can determine the fault accurately and timely. First, FCM clustering is employed to classify the data into different clusters, which helps to estimate whether there is a fault and how many fault types there are. If fault signals exist, the fault vibration signals are then demodulated and decomposed into different frequency bands by MMEMD in order to be analyzed further. In order to overcome the mode mixing defect of empirical mode decomposition (EMD), a novel method called MMEMD is proposed. It is an improvement to masking empirical mode decomposition (MEMD). By adding multi-masking signals to the signals to be decomposed in different levels, it can restrain low-frequency components from mixing in highfrequency components effectively in the sifting process and then suppress the mode mixing. It has the advantages of easy implementation and strong ability of suppressing modal mixing. The fault type is determined by Hilbert envelope finally. The results of simulation signal decomposition showed the high performance of MMEMD. Experiments of bearing fault diagnosis in wind turbine bearing fault diagnosis proved the validity and high accuracy of the new method.
文摘本文提出了一种新颖的MEMS多掩膜工艺,实现了带有大台阶和大深宽比窄槽的衬底上的体硅精细加工。通过薄胶多次光刻在衬底上制作出氧化硅(SiO2)、氮化硅(Si3N4)、光刻胶(photo-resist,PR)等材料的多层掩膜图形,每层掩膜可以进行一次衬底刻蚀或腐蚀,刻蚀或腐蚀完毕后去除该层掩膜。该工艺解决了MEMS工艺中的深坑涂胶和光刻问题,结合深反应离子刻蚀(Deep Re-active Ion Etching,DR IE)、湿法腐蚀等工艺可以用于多级台阶、深坑底部精细结构、微结构释放等MEMS工艺。
