in an inductively-coupled plasma (ICP), the dependence of radio-frequency (rf) tuned self-DC bias of substrate on the discharge parameters such as rf source power, gas pressure, gas now rate and electric connection of...in an inductively-coupled plasma (ICP), the dependence of radio-frequency (rf) tuned self-DC bias of substrate on the discharge parameters such as rf source power, gas pressure, gas now rate and electric connection of upper cover with ground have been studied. Experimental results show that the tuned bias of substrate can be generated and independently controlled in an inductively- coupled plasma without a rf bias source, and the advantage of this technique together with inductively-coupled plasma can find potential applications in plasma-enhanced chemical vapor deposition.展开更多
Stable operations of single direct current （DC） discharge, single radio frequency （RF） discharge and DC ＋ RF hybrid discharge are achieved in a specially-designed DC enhanced inductively- coupled plasma （DCE-ICP...Stable operations of single direct current （DC） discharge, single radio frequency （RF） discharge and DC ＋ RF hybrid discharge are achieved in a specially-designed DC enhanced inductively- coupled plasma （DCE-ICP） source. Their plasma characteristics, such as electron density, electron temperature and the electron density spatial distribution profiles are investigated and compared experimentally at different gas pressures. It is found that under the condition of single RF discharge, the electron density distribution profiles show a ＇convex＇ shape and ＇saddle＇ shape at gas pressures of 3 mTorr and 150 mTorr respectively. This result can be attributed to the transition of electron kinetics from nonlocal to local kinetics with an increase in gas pressure. Moreover, in the operation of DC q- RF hybrid discharge at different gas pressures, the DC discharge has different effects on plasma uniformity. The plasma uniformity can be improved by modulating DC power at a high pressure of 150 mTorr where local electron kinetics is dominant, whereas plasma uniformity deteriorates at a low pressure of 3 mTorr where nonlocal electron kinetics prevails. This phenomenon, as analyzed, is due to the obvious nonlinear enhancement effect of electron density at the chamber center, and the inherent radial distribution difference in the electron density with single RF discharge at different gas pressures.展开更多
CO2 decomposition is a very strongly endothermic reaction where very high temperatures are required to thermally dissociate CO2.Radio frequency inductively-coupled plasma enables to selectively activate and dissociate...CO2 decomposition is a very strongly endothermic reaction where very high temperatures are required to thermally dissociate CO2.Radio frequency inductively-coupled plasma enables to selectively activate and dissociate CO2 at room temperature.Tuning the flow rate and the frequency of the radio frequency inductively-coupled plasma gives high yields of CO under mild conditions.Finally the discovery of a plasma catalytic effect has been demonstrated for CO2 dissociation that shows a significant increase of the CO yield by metallic meshes.The metallic meshes become catalysts under exposure to plasma to activate the recombination reaction of atomic O to yield O2,thereby reducing the reaction to convert CO back to CO2.Inductively-coupled hybrid plasma catalysis allows access to study and to utilize high CO2 conversion in a non-thermal plasma regime.This advance offers opportunities to investigate the possibility to use radio frequency inductively-coupled plasma to store superfluous renewable electricity into high-valuable CO in time where the price of renewable electricity is plunging.展开更多
基金This work is supported by the National Natural Science Foundation of China. No.19835030.
文摘in an inductively-coupled plasma (ICP), the dependence of radio-frequency (rf) tuned self-DC bias of substrate on the discharge parameters such as rf source power, gas pressure, gas now rate and electric connection of upper cover with ground have been studied. Experimental results show that the tuned bias of substrate can be generated and independently controlled in an inductively- coupled plasma without a rf bias source, and the advantage of this technique together with inductively-coupled plasma can find potential applications in plasma-enhanced chemical vapor deposition.
基金supported by National Natural Science Foundation of China under Grant No. 11475038
文摘Stable operations of single direct current （DC） discharge, single radio frequency （RF） discharge and DC ＋ RF hybrid discharge are achieved in a specially-designed DC enhanced inductively- coupled plasma （DCE-ICP） source. Their plasma characteristics, such as electron density, electron temperature and the electron density spatial distribution profiles are investigated and compared experimentally at different gas pressures. It is found that under the condition of single RF discharge, the electron density distribution profiles show a ＇convex＇ shape and ＇saddle＇ shape at gas pressures of 3 mTorr and 150 mTorr respectively. This result can be attributed to the transition of electron kinetics from nonlocal to local kinetics with an increase in gas pressure. Moreover, in the operation of DC q- RF hybrid discharge at different gas pressures, the DC discharge has different effects on plasma uniformity. The plasma uniformity can be improved by modulating DC power at a high pressure of 150 mTorr where local electron kinetics is dominant, whereas plasma uniformity deteriorates at a low pressure of 3 mTorr where nonlocal electron kinetics prevails. This phenomenon, as analyzed, is due to the obvious nonlinear enhancement effect of electron density at the chamber center, and the inherent radial distribution difference in the electron density with single RF discharge at different gas pressures.
基金supported by the National Natural Science Foundation of China(No.51561135013 and No.21603202).
文摘CO2 decomposition is a very strongly endothermic reaction where very high temperatures are required to thermally dissociate CO2.Radio frequency inductively-coupled plasma enables to selectively activate and dissociate CO2 at room temperature.Tuning the flow rate and the frequency of the radio frequency inductively-coupled plasma gives high yields of CO under mild conditions.Finally the discovery of a plasma catalytic effect has been demonstrated for CO2 dissociation that shows a significant increase of the CO yield by metallic meshes.The metallic meshes become catalysts under exposure to plasma to activate the recombination reaction of atomic O to yield O2,thereby reducing the reaction to convert CO back to CO2.Inductively-coupled hybrid plasma catalysis allows access to study and to utilize high CO2 conversion in a non-thermal plasma regime.This advance offers opportunities to investigate the possibility to use radio frequency inductively-coupled plasma to store superfluous renewable electricity into high-valuable CO in time where the price of renewable electricity is plunging.
