Y2000-62135-245 0019861采用 PECVD 氮化物用于混合信号和射频电路的高密度金属绝缘体金属电容器=High density metal insula-tor metal capacitors using PECVD Nitride for mixed sig-nal and RF circuits[会,英]/Kar-Roy,A.& Hu...Y2000-62135-245 0019861采用 PECVD 氮化物用于混合信号和射频电路的高密度金属绝缘体金属电容器=High density metal insula-tor metal capacitors using PECVD Nitride for mixed sig-nal and RF circuits[会,英]/Kar-Roy,A.& Hu,C.//1999 IEEE Proceedings of InternationaI InterconnectTechnology Conference.-245～247(EC)展开更多
文摘Y2000-62135-245 0019861采用 PECVD 氮化物用于混合信号和射频电路的高密度金属绝缘体金属电容器=High density metal insula-tor metal capacitors using PECVD Nitride for mixed sig-nal and RF circuits[会,英]/Kar-Roy,A.& Hu,C.//1999 IEEE Proceedings of InternationaI InterconnectTechnology Conference.-245～247(EC)
