LIGA technique has been developed since 1993 at BSRF,including the fabrication of LIGA mask, deep X-ray Lithography,electroplating,the pouring molding and the applications in some fields.The LIGA mask with gold absorb...LIGA technique has been developed since 1993 at BSRF,including the fabrication of LIGA mask, deep X-ray Lithography,electroplating,the pouring molding and the applications in some fields.The LIGA mask with gold absorbing structures of 20μm thick ness and 5μm width and Kapton membrane of around 5μm thicness has been successfull fabricated and applied to the deep X-ray lithography with the PMMA structure of 1mm thickness or obove.the beamline form a wiggler is used for the deep X-ray lithography of LIGA statiion and is open to othe institutes researching the deep X-ray lithography.The normal process of LIGA technique with the exception of molding has been established with the PMMA structures of 500μm thickness at BSRF.The largest aspect ratio of PMMA structrues can reach about 50 with the height of 500μm and the lateral siae of 10μm. The nickel and copper structures with the theickness of 0.5mm and 1mm have been made by using the electroplating technique.The SU8 as a resist material of deep etch lithography with UV light is also developed in the fabrication of LIGA mask and some devices at BSRF.Electromagnetic stepping micro motor,haet exchange,accelerator,structures used in the EDM(electro discharge machinging) are being developed for the future applications.展开更多
In this paper,a new process to fabricate an electromagnetic stepping micromotor using surface scarificial layer technology(SSLT) is illustrated,and the SEM photo of the stepping micromotor is showed.The torque of the ...In this paper,a new process to fabricate an electromagnetic stepping micromotor using surface scarificial layer technology(SSLT) is illustrated,and the SEM photo of the stepping micromotor is showed.The torque of the stepping micromotor with maxsimum torque of 60μNm is directly calculated by using electromagnetics laws and the law of conservation of energy.The stator and the shaft and the rotor of the micromotor with the material of nickel are first all fabricated by normal LIGA process at the same time.The sacrificial layer structure with the material of AZ resist is made on the surface of the rotor by using SSLT.The stator and the shaft are fixed together with copper substrate instead of the old Ti substrate by electroplating.After removing the Ti substrate,PMMA resist and the sacrificial layer structure,the rotor is separated from the stator and new copper substrate,and can rotate on the new substrate driven by magnetic force.The four coils with 300 turns each are wound on iron bars by hand using microscope and stepping motor.The bars are assembled by hand into the stator holes from rear of new copper substrate to from a magnetic circuit with the stator and the rotor.A power supply with four consecutive pulses provides the current for the coils wound on the iron bars adn produces the magnetic force to drive the rotor to run with the speed of 60 rpm.展开更多
文摘LIGA technique has been developed since 1993 at BSRF,including the fabrication of LIGA mask, deep X-ray Lithography,electroplating,the pouring molding and the applications in some fields.The LIGA mask with gold absorbing structures of 20μm thick ness and 5μm width and Kapton membrane of around 5μm thicness has been successfull fabricated and applied to the deep X-ray lithography with the PMMA structure of 1mm thickness or obove.the beamline form a wiggler is used for the deep X-ray lithography of LIGA statiion and is open to othe institutes researching the deep X-ray lithography.The normal process of LIGA technique with the exception of molding has been established with the PMMA structures of 500μm thickness at BSRF.The largest aspect ratio of PMMA structrues can reach about 50 with the height of 500μm and the lateral siae of 10μm. The nickel and copper structures with the theickness of 0.5mm and 1mm have been made by using the electroplating technique.The SU8 as a resist material of deep etch lithography with UV light is also developed in the fabrication of LIGA mask and some devices at BSRF.Electromagnetic stepping micro motor,haet exchange,accelerator,structures used in the EDM(electro discharge machinging) are being developed for the future applications.
文摘In this paper,a new process to fabricate an electromagnetic stepping micromotor using surface scarificial layer technology(SSLT) is illustrated,and the SEM photo of the stepping micromotor is showed.The torque of the stepping micromotor with maxsimum torque of 60μNm is directly calculated by using electromagnetics laws and the law of conservation of energy.The stator and the shaft and the rotor of the micromotor with the material of nickel are first all fabricated by normal LIGA process at the same time.The sacrificial layer structure with the material of AZ resist is made on the surface of the rotor by using SSLT.The stator and the shaft are fixed together with copper substrate instead of the old Ti substrate by electroplating.After removing the Ti substrate,PMMA resist and the sacrificial layer structure,the rotor is separated from the stator and new copper substrate,and can rotate on the new substrate driven by magnetic force.The four coils with 300 turns each are wound on iron bars by hand using microscope and stepping motor.The bars are assembled by hand into the stator holes from rear of new copper substrate to from a magnetic circuit with the stator and the rotor.A power supply with four consecutive pulses provides the current for the coils wound on the iron bars adn produces the magnetic force to drive the rotor to run with the speed of 60 rpm.
