Using silica gel as the precursor, MCM-22(p) was synthesized under the static conditions. Then ITQ-2 zeolite was obtained by using n-cetyltrimethylammonium bromide (CTAB) and tetrapro- pylammonium hydroxide (TPAOH) as...Using silica gel as the precursor, MCM-22(p) was synthesized under the static conditions. Then ITQ-2 zeolite was obtained by using n-cetyltrimethylammonium bromide (CTAB) and tetrapro- pylammonium hydroxide (TPAOH) as the swelling agents to swell the pores of MCM-22(p). The ob- tained zeolite was characterized by XRD, SEM, BET, NH3-TPD. The results show that the zeolite had the best swelling when MCM-22(p):CTAB:TPAOH=1:4:1. The synthesis duration and temperature did not influence significantly the pore swelling. Except TPAOH, CTAB can also be used together with tetrabuthylammonium hydroxide (TBAOH) as the pore swelling agent. There was contribution of sur- face area and pore volume from the mesoporous pores in the ITQ-2 zeolite and it also showed weaker acidity than MCM-22. However, the ITQ-2 supported NiW catalyst showed higher activity and selec- tivity to the middle distillates in the hydrocracking of vacuum gasoil (VGO) than MCM-22 supported catalyst. This implied that the diffusion of large molecules of heavy oil in the catalyst was facilitated due to the presence of the mesoporous pores and hence higher activity and selectivity to middle dis- tillates.展开更多
Rolled static cracking agent(RSCA)can solve the intractable problem of traditional bulk static cracking agent(BSCA)in engineering applications.This paper innovatively studies the rational water-cement ratio of BSCA an...Rolled static cracking agent(RSCA)can solve the intractable problem of traditional bulk static cracking agent(BSCA)in engineering applications.This paper innovatively studies the rational water-cement ratio of BSCA and the immersion soaking time of RSCA under the condition of controlling temperature.Through the expansion and cracking performance experiments,the development characteristics of expansion pressure,the cracking effect of the single-hole specimen and the performance of hole spraying prevention under the action of BSCA and RSCA were compared and analyzed.The results show that:(1)The volume growth rate of static cracking agent decreases with the increase of water-cement ratio,and the fluidity increases with the increase of water-cement ratio.The rational water-cement ratio for BSCA application is 0.3,and the rational immersion time of RSCA is 2-2.5 min;(2)Under the bore diameters of 30,35,40 and 45 mm,the expansion pressure of BSCA with a water-cement ratio of 0.3 is 38.2,52.3,61.5 and 68 MPa,and the expansion pressure of RSCA immersed in water for 2.5 min is 43.5,58.8,69.5 and 75.1 MPa,respectively.Among them,the development speed of expansion pressure of BSCA is higher than that of RSCA,and the arrival time of the peak expansion pressure of RSCA is 1.7 times that of BSCA;(3)The crack initiation speed of single-hole specimen under the action of RSCA is 10.3%lower than that under the action of BSCA,but the cracking speed of the former is 72.6%higher than that of the latter;(4)The hole spraying occurs in BSCA under the bore diameter of 50,55 and 60 mm,while the hole spraying occurs in RSCA under the bore diameter of 60 mm.In terms of bore diameter,the hole spraying prevention of the RSCA is better than that of BSCA.The research results enrich the static blasting technology and provide data support and theoretical reference for field application.展开更多
This work investigates systematically the effect of FA/O II chelating agent and FA/O I surfactant in alkaline cleaning solutions on benzotriazole (BTA) removal during post-Cu CMP cleaning in GLSI under the con- diti...This work investigates systematically the effect of FA/O II chelating agent and FA/O I surfactant in alkaline cleaning solutions on benzotriazole (BTA) removal during post-Cu CMP cleaning in GLSI under the con- dition of static etching. The best detergent formulation for BTA removal can be determined by optimization of the experiments of single factor and compound cleaning solution, which has been further confirmed experimentally by contact angle (CA) measurements. The resulting solution with the best formulation has been measured for the actual production line, and the results demonstrate that the obtained cleaning solution can effectively and efficiently remove BTA, CuO and abrasive SiO2 without basically causing interfacial corrosion. This work demonstrates the possibility of developing a simple, low-cost and environmentally-friendly cleaning solution to effectively solve the issues of BTA removal on post-Cu CMP cleaning in a multi-layered copper wafer.展开更多
Static cracking agent(SCA)is actively investigated as an alternative to explosive blasting for rock breakage due to its immense expansion property.SCA can eliminate the negative effects of shock,noise and harmful gase...Static cracking agent(SCA)is actively investigated as an alternative to explosive blasting for rock breakage due to its immense expansion property.SCA can eliminate the negative effects of shock,noise and harmful gases encountered in explosive blasting processes.Accurate measurement and deep understanding of the expansive properties of SCAs are important in their industrial application.An improved outer pipe method(OPM),termed the upper end surface method(UESM),is proposed in this paper to overcome the shortcomings of the OPM in the expansive pressure measurement of SCAs.Numerical simulation is used to proof the concept and a mathematical model established to relate the internal pressure and the radial strains at different positions in the upper end surface method test equipment.The new equipment is calibrated using oil pressure and strain measurements.The calibrated equipment is then used to measure the expansion pressure of SCA at three different water contents to proof its potential.The differences in the measurements with OPM and UESM at three different moisture contents are less than 4%.The experimental results confirm the accuracy and applicability of the more user friendly and less expensive UESM in the measurement of the expansive pressures of SCAs.展开更多
文摘Using silica gel as the precursor, MCM-22(p) was synthesized under the static conditions. Then ITQ-2 zeolite was obtained by using n-cetyltrimethylammonium bromide (CTAB) and tetrapro- pylammonium hydroxide (TPAOH) as the swelling agents to swell the pores of MCM-22(p). The ob- tained zeolite was characterized by XRD, SEM, BET, NH3-TPD. The results show that the zeolite had the best swelling when MCM-22(p):CTAB:TPAOH=1:4:1. The synthesis duration and temperature did not influence significantly the pore swelling. Except TPAOH, CTAB can also be used together with tetrabuthylammonium hydroxide (TBAOH) as the pore swelling agent. There was contribution of sur- face area and pore volume from the mesoporous pores in the ITQ-2 zeolite and it also showed weaker acidity than MCM-22. However, the ITQ-2 supported NiW catalyst showed higher activity and selec- tivity to the middle distillates in the hydrocracking of vacuum gasoil (VGO) than MCM-22 supported catalyst. This implied that the diffusion of large molecules of heavy oil in the catalyst was facilitated due to the presence of the mesoporous pores and hence higher activity and selectivity to middle dis- tillates.
基金supported by the National Natural Science Foundation of China(Nos.51874277 and 41977238)the National Science Fund for Excellent Young Scholars of China(No.52122404).
文摘Rolled static cracking agent(RSCA)can solve the intractable problem of traditional bulk static cracking agent(BSCA)in engineering applications.This paper innovatively studies the rational water-cement ratio of BSCA and the immersion soaking time of RSCA under the condition of controlling temperature.Through the expansion and cracking performance experiments,the development characteristics of expansion pressure,the cracking effect of the single-hole specimen and the performance of hole spraying prevention under the action of BSCA and RSCA were compared and analyzed.The results show that:(1)The volume growth rate of static cracking agent decreases with the increase of water-cement ratio,and the fluidity increases with the increase of water-cement ratio.The rational water-cement ratio for BSCA application is 0.3,and the rational immersion time of RSCA is 2-2.5 min;(2)Under the bore diameters of 30,35,40 and 45 mm,the expansion pressure of BSCA with a water-cement ratio of 0.3 is 38.2,52.3,61.5 and 68 MPa,and the expansion pressure of RSCA immersed in water for 2.5 min is 43.5,58.8,69.5 and 75.1 MPa,respectively.Among them,the development speed of expansion pressure of BSCA is higher than that of RSCA,and the arrival time of the peak expansion pressure of RSCA is 1.7 times that of BSCA;(3)The crack initiation speed of single-hole specimen under the action of RSCA is 10.3%lower than that under the action of BSCA,but the cracking speed of the former is 72.6%higher than that of the latter;(4)The hole spraying occurs in BSCA under the bore diameter of 50,55 and 60 mm,while the hole spraying occurs in RSCA under the bore diameter of 60 mm.In terms of bore diameter,the hole spraying prevention of the RSCA is better than that of BSCA.The research results enrich the static blasting technology and provide data support and theoretical reference for field application.
基金Project supported by the Major National Science and Technology Special Projects(No.2009ZX02308)
文摘This work investigates systematically the effect of FA/O II chelating agent and FA/O I surfactant in alkaline cleaning solutions on benzotriazole (BTA) removal during post-Cu CMP cleaning in GLSI under the con- dition of static etching. The best detergent formulation for BTA removal can be determined by optimization of the experiments of single factor and compound cleaning solution, which has been further confirmed experimentally by contact angle (CA) measurements. The resulting solution with the best formulation has been measured for the actual production line, and the results demonstrate that the obtained cleaning solution can effectively and efficiently remove BTA, CuO and abrasive SiO2 without basically causing interfacial corrosion. This work demonstrates the possibility of developing a simple, low-cost and environmentally-friendly cleaning solution to effectively solve the issues of BTA removal on post-Cu CMP cleaning in a multi-layered copper wafer.
基金funded by the State Key Research Development Program of China(No.2018YFC0604400)the National Science Foundation of China(Nos.51874068,52074062)+2 种基金the Fundamental Research Funds for the Central Universities(Nos.N2001003,N160107001,N180701016,N182608003,N2001001)the 111 Project(No.B17009)The authors also acknowledge Nazarbayev University for funding the research through its Collaborative Research Program(No.OPCRP2020014).
文摘Static cracking agent(SCA)is actively investigated as an alternative to explosive blasting for rock breakage due to its immense expansion property.SCA can eliminate the negative effects of shock,noise and harmful gases encountered in explosive blasting processes.Accurate measurement and deep understanding of the expansive properties of SCAs are important in their industrial application.An improved outer pipe method(OPM),termed the upper end surface method(UESM),is proposed in this paper to overcome the shortcomings of the OPM in the expansive pressure measurement of SCAs.Numerical simulation is used to proof the concept and a mathematical model established to relate the internal pressure and the radial strains at different positions in the upper end surface method test equipment.The new equipment is calibrated using oil pressure and strain measurements.The calibrated equipment is then used to measure the expansion pressure of SCA at three different water contents to proof its potential.The differences in the measurements with OPM and UESM at three different moisture contents are less than 4%.The experimental results confirm the accuracy and applicability of the more user friendly and less expensive UESM in the measurement of the expansive pressures of SCAs.