β-Ga2O3作为新型宽禁带半导体材料,近年来受到了人们的广泛关注。β-Ga2O3禁带宽度可达4. 7 e V,相比于第三代半导体SiC和Ga N,具有禁带宽度更大、击穿场强更高、Baliga品质因子更大、吸收截止边更短、生长成本更低的优点,有望成为高...β-Ga2O3作为新型宽禁带半导体材料,近年来受到了人们的广泛关注。β-Ga2O3禁带宽度可达4. 7 e V,相比于第三代半导体SiC和Ga N,具有禁带宽度更大、击穿场强更高、Baliga品质因子更大、吸收截止边更短、生长成本更低的优点,有望成为高压、大功率、低损耗功率器件和深紫外光电子器件的优选材料。此外,β-Ga2O3单晶可以通过熔体法生长,材料制备成本相对较低,有利于大规模应用。重点介绍了β-Ga2O3单晶的生长及工艺优化,然后对晶体加工、性能表征、光电探测及功率器件应用等方面进行了讨论,并展望了β-Ga2O3晶体未来的发展方向。展开更多
A new type of magnetic device was used to replace the conventionalelectro-magnetic field for CZSi (doped with Ge) growth. The device was composed of three permanentmagnetic rings and called PMCZ device. The lines of m...A new type of magnetic device was used to replace the conventionalelectro-magnetic field for CZSi (doped with Ge) growth. The device was composed of three permanentmagnetic rings and called PMCZ device. The lines of magnetic force are horizontally distributed atradial 360℃. Using the ring permanent magnetic field, thermal convection in melt and centrifugalpumping flows due to crystal rotation could be strongly suppressed so that the fluctuations oftemperature and micro-growth rate at solid/liquid interface could be restrained effectively. In thePMCZ condition, the growing environment of SiGe bulk single crystal was similar to the crystalgrowth in space under the condition of micro-gravity. The motion of impurities (Ge, oxygen, etc.)had been controlled by diffusion near the solid/liquid interface. Oxygen concentration became lowerand the distribution of composition became more homogeneous along longitudinal direction and acrossa radial section in the grown SiGe crystal. The mechanism of PMCZ superior to MCZ was alsodiscussed.展开更多
文摘β-Ga2O3作为新型宽禁带半导体材料,近年来受到了人们的广泛关注。β-Ga2O3禁带宽度可达4. 7 e V,相比于第三代半导体SiC和Ga N,具有禁带宽度更大、击穿场强更高、Baliga品质因子更大、吸收截止边更短、生长成本更低的优点,有望成为高压、大功率、低损耗功率器件和深紫外光电子器件的优选材料。此外,β-Ga2O3单晶可以通过熔体法生长,材料制备成本相对较低,有利于大规模应用。重点介绍了β-Ga2O3单晶的生长及工艺优化,然后对晶体加工、性能表征、光电探测及功率器件应用等方面进行了讨论,并展望了β-Ga2O3晶体未来的发展方向。
基金This work is financially supported by the National Natural Science Foundation of China (No. 59772037)the Natural Science Foundation of Hebei Province (No. 500016)
文摘A new type of magnetic device was used to replace the conventionalelectro-magnetic field for CZSi (doped with Ge) growth. The device was composed of three permanentmagnetic rings and called PMCZ device. The lines of magnetic force are horizontally distributed atradial 360℃. Using the ring permanent magnetic field, thermal convection in melt and centrifugalpumping flows due to crystal rotation could be strongly suppressed so that the fluctuations oftemperature and micro-growth rate at solid/liquid interface could be restrained effectively. In thePMCZ condition, the growing environment of SiGe bulk single crystal was similar to the crystalgrowth in space under the condition of micro-gravity. The motion of impurities (Ge, oxygen, etc.)had been controlled by diffusion near the solid/liquid interface. Oxygen concentration became lowerand the distribution of composition became more homogeneous along longitudinal direction and acrossa radial section in the grown SiGe crystal. The mechanism of PMCZ superior to MCZ was alsodiscussed.
