Gd-doped Ceria (GCO:Gd_(0.1)Ce_(0.9)O_(1.95)) sensing films have been fabricated successfully on glasses and porous Al_2O_3 ceramic substrates by RF magnetron sputtering.Sputtering conditions such as power and tempera...Gd-doped Ceria (GCO:Gd_(0.1)Ce_(0.9)O_(1.95)) sensing films have been fabricated successfully on glasses and porous Al_2O_3 ceramic substrates by RF magnetron sputtering.Sputtering conditions such as power and temperature have been investigated and the sample was characterized in detail by XRD,SEM and AC impedance spectroscopy.The results show that the films grow preferentially along the (111) compact plane with a pure fluorite structure and the crystal grain grows more sufficiently with increasing of the annealing temperature.In addition,a high oxygen ion conductivity of 2.24×10^(-2) S.cm^(-1) is achieved at 800℃.展开更多
文摘Gd-doped Ceria (GCO:Gd_(0.1)Ce_(0.9)O_(1.95)) sensing films have been fabricated successfully on glasses and porous Al_2O_3 ceramic substrates by RF magnetron sputtering.Sputtering conditions such as power and temperature have been investigated and the sample was characterized in detail by XRD,SEM and AC impedance spectroscopy.The results show that the films grow preferentially along the (111) compact plane with a pure fluorite structure and the crystal grain grows more sufficiently with increasing of the annealing temperature.In addition,a high oxygen ion conductivity of 2.24×10^(-2) S.cm^(-1) is achieved at 800℃.
