Ta-doped In_2O_3 transparent conductive oxide films were deposited on glass substrates using radio-frequency (RF) sputtering at 300°C.The influence of post-annealing on the structural,morphologic,electrical and o...Ta-doped In_2O_3 transparent conductive oxide films were deposited on glass substrates using radio-frequency (RF) sputtering at 300°C.The influence of post-annealing on the structural,morphologic,electrical and optical properties of the films was investigated using X-ray diffraction,field emission scanning electron microscopy,Hall measurements and optical transmission spectroscopy.The obtained films were polycrystalline with a cubic structure and were preferentially oriented in the (222) crystallographic direction.The lowest resistivity,5.1×10 4 cm,was obtained in the film annealed at 500°C,which is half of that of the un-annealed film (9.9×10 4 cm).The average optical transmittance of the films was over 90%.The optical bandgap was found to decrease with increasing annealing temperature.展开更多
Reflectance and transmittance parameters of pulsed laser deposited barium strontium titanate (BST) were investigated using spectrophotometric methods. Three stoichiometries consisting of BaxSr1-xTiO3 (x = 0.30, 0.40, ...Reflectance and transmittance parameters of pulsed laser deposited barium strontium titanate (BST) were investigated using spectrophotometric methods. Three stoichiometries consisting of BaxSr1-xTiO3 (x = 0.30, 0.40, 0.50) were deposited on glass substrates using oxygen partial pressures of 1.3 Pa ± 0.13 Pa at 500oC. Subsequently, the measured optical parameters were employed to determine the refractive index (n), extinction coefficient (k), optical conductivity (σ), absorption coefficient (α) and optical bandgap (Eg) using swept spectra in the ultraviolet, visible and near-infrared range (200 nm - 1100 nm) as these have not been reported in the literature. The calculated parameters for Ba0.4Sr0.6TiO3 are reported in this experimental work. Minimal differences in the transmittance have been observed at the visible band edges when comparing each stoichiometry. Sharp cutoffs were observed at the bands edges and strong absorbance in the 200 nm - 300 nm band as attributed to the crystal structure based upon the oxygen partial pressure during the deposition process.展开更多
基金supported by the National Natural Science Foundation of China (51003073/E0303)Tianjin Natural Science Foundation (08JCYBJC11400)
文摘Ta-doped In_2O_3 transparent conductive oxide films were deposited on glass substrates using radio-frequency (RF) sputtering at 300°C.The influence of post-annealing on the structural,morphologic,electrical and optical properties of the films was investigated using X-ray diffraction,field emission scanning electron microscopy,Hall measurements and optical transmission spectroscopy.The obtained films were polycrystalline with a cubic structure and were preferentially oriented in the (222) crystallographic direction.The lowest resistivity,5.1×10 4 cm,was obtained in the film annealed at 500°C,which is half of that of the un-annealed film (9.9×10 4 cm).The average optical transmittance of the films was over 90%.The optical bandgap was found to decrease with increasing annealing temperature.
文摘Reflectance and transmittance parameters of pulsed laser deposited barium strontium titanate (BST) were investigated using spectrophotometric methods. Three stoichiometries consisting of BaxSr1-xTiO3 (x = 0.30, 0.40, 0.50) were deposited on glass substrates using oxygen partial pressures of 1.3 Pa ± 0.13 Pa at 500oC. Subsequently, the measured optical parameters were employed to determine the refractive index (n), extinction coefficient (k), optical conductivity (σ), absorption coefficient (α) and optical bandgap (Eg) using swept spectra in the ultraviolet, visible and near-infrared range (200 nm - 1100 nm) as these have not been reported in the literature. The calculated parameters for Ba0.4Sr0.6TiO3 are reported in this experimental work. Minimal differences in the transmittance have been observed at the visible band edges when comparing each stoichiometry. Sharp cutoffs were observed at the bands edges and strong absorbance in the 200 nm - 300 nm band as attributed to the crystal structure based upon the oxygen partial pressure during the deposition process.
