The modeling and evaluation of a prototype rotary micromotor where the annular rotor is supported electrostatically in five degrees of freedom is presented in order to study the behavior of this levitated micromotor a...The modeling and evaluation of a prototype rotary micromotor where the annular rotor is supported electrostatically in five degrees of freedom is presented in order to study the behavior of this levitated micromotor and further optimize the device geometry. The analytical torque model is obtained based on the principle of a planar variable-capacitance electrostatic motor while the viscous damping caused by air film between the stator and rotor is derived using laminar Couette flow model. Simulation results of the closed-loop drive motor, based on the developed dynamic model after eliminating mechanical friction torque via electrostatic suspension, are presented. The effects of the high-voltage drive, required for rotation of the rotor, on overload capacity and suspension stiffness of the electrostatic bearing system are also analytically evaluated in an effort to determine allowable drive voltage and attainable rotor speed in operation. The analytical results show that maximum speed of the micromotor is limited mainly by viscous drag torque and stiffness of the bearing system. Therefore, it is expected to operate the device in vacuum so as to increase the rotor speed significantly, especially for those electrostatically levitated micromotors to be used as an angular rate micro-gyroscope.展开更多
The reasons for inducing quadrature error and offset error are analyzed and the expressions of quadrature error and offset error are induced. The open-loop system analysis indicates that, in order to avoid the appeara...The reasons for inducing quadrature error and offset error are analyzed and the expressions of quadrature error and offset error are induced. The open-loop system analysis indicates that, in order to avoid the appearance of harmonic peaks, the frequency difference δf between drive mode and sense mode must be less than 1/（2Qy）. In order to eliminate the effects of the quadrature error and the offset error, as well as the inherent non- linearity in the capacitance-type sensors, a closed-loop feedback control circuit with quadrature correction is designed. The experimental results indicate that the quadrature error and offset error are corrected. By comparing with open-loop detection, the closed-loop feedback control circuit with quadrature correction decreases the non-linearity of the scale factor from 16. 02% to 0. 35 %, widens the maximum rate capability from ± 270 （°）/s to ± 370 （°）/s and increases the stability of zero bias from 155. 2 （°）/h to 60. 6 （°）/h.展开更多
基金supported by National Hi-tech Research and Development Program of China (863 Program, Grant No. 2008AA04Z312)National Natural Science Foundation of China (Grant No. 50577036)
文摘The modeling and evaluation of a prototype rotary micromotor where the annular rotor is supported electrostatically in five degrees of freedom is presented in order to study the behavior of this levitated micromotor and further optimize the device geometry. The analytical torque model is obtained based on the principle of a planar variable-capacitance electrostatic motor while the viscous damping caused by air film between the stator and rotor is derived using laminar Couette flow model. Simulation results of the closed-loop drive motor, based on the developed dynamic model after eliminating mechanical friction torque via electrostatic suspension, are presented. The effects of the high-voltage drive, required for rotation of the rotor, on overload capacity and suspension stiffness of the electrostatic bearing system are also analytically evaluated in an effort to determine allowable drive voltage and attainable rotor speed in operation. The analytical results show that maximum speed of the micromotor is limited mainly by viscous drag torque and stiffness of the bearing system. Therefore, it is expected to operate the device in vacuum so as to increase the rotor speed significantly, especially for those electrostatically levitated micromotors to be used as an angular rate micro-gyroscope.
文摘The reasons for inducing quadrature error and offset error are analyzed and the expressions of quadrature error and offset error are induced. The open-loop system analysis indicates that, in order to avoid the appearance of harmonic peaks, the frequency difference δf between drive mode and sense mode must be less than 1/（2Qy）. In order to eliminate the effects of the quadrature error and the offset error, as well as the inherent non- linearity in the capacitance-type sensors, a closed-loop feedback control circuit with quadrature correction is designed. The experimental results indicate that the quadrature error and offset error are corrected. By comparing with open-loop detection, the closed-loop feedback control circuit with quadrature correction decreases the non-linearity of the scale factor from 16. 02% to 0. 35 %, widens the maximum rate capability from ± 270 （°）/s to ± 370 （°）/s and increases the stability of zero bias from 155. 2 （°）/h to 60. 6 （°）/h.
