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Co_2O_3掺杂对Pb(Ni_(1/3)Nb_(2/3))(Zr,Ti)O_3压电陶瓷电学性能及介电弛豫的影响 被引量:10
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作者 彭贵贵 郑德一 胡顺敏 《硅酸盐学报》 EI CAS CSCD 北大核心 2016年第3期380-386,共7页
采用氧化物粉末固相烧结法制备Pb(Ni_(1/3)Nb_(2/3))0.5(Zr_(0.3)Ti_(0.7))0.5O_3–w Co_2O_3(0.5PNN–0.5PZT–w Co)压电陶瓷。研究了Co_2O_3掺杂含量对0.5PNN–0.5ZT压电陶瓷相结构、显微组织、电学性能及介电弛豫的影响。结果表明:Co... 采用氧化物粉末固相烧结法制备Pb(Ni_(1/3)Nb_(2/3))0.5(Zr_(0.3)Ti_(0.7))0.5O_3–w Co_2O_3(0.5PNN–0.5PZT–w Co)压电陶瓷。研究了Co_2O_3掺杂含量对0.5PNN–0.5ZT压电陶瓷相结构、显微组织、电学性能及介电弛豫的影响。结果表明:Co^(3+)掺杂进入主晶体结构中占据了B位。当0.2%≤w≤0.8%(质量分数)时,样品为单一稳定的钙钛矿结构,存在准同型相界;通过修正Curie–Weiss定律,较好地描述了陶瓷弥散相变的特征,弥散相变系数γ随着Co_2O_3掺杂量的增加,先增加后减小,当w=0.4%时,γ达到最大值,表明样品的介电弛豫特征更为明显。样品具有最佳的综合电学性能,压电常数d33=675 p C/N,机电耦合系数kp=60%,介电常数εr和介电损耗tanδ分别约为5 765和1.16%,说明介电弛豫行为与电学性能相关。 展开更多
关键词 氧化钴掺杂 介电弛豫 电学性能
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微纳层叠挤出CNTs/HIPS复合材料的介电与导电性能 被引量:6
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作者 戴坤添 安瑛 +3 位作者 李长金 程祥 杨卫民 焦志伟 《塑料》 CAS CSCD 北大核心 2017年第1期72-75,82,共5页
利用自制的微纳层叠挤出装置制备了CNTs含量为1%、3%时的1、9、81、729层的碳纳米管/高抗冲聚苯乙烯(CNTs/HIPS)多层复合材料,研究了微纳层叠挤出技术对复合材料介电与导电性能的影响。结果表明:随着层数的增加,低频下交流电导率轻微下... 利用自制的微纳层叠挤出装置制备了CNTs含量为1%、3%时的1、9、81、729层的碳纳米管/高抗冲聚苯乙烯(CNTs/HIPS)多层复合材料,研究了微纳层叠挤出技术对复合材料介电与导电性能的影响。结果表明:随着层数的增加,低频下交流电导率轻微下降,而介电常数得到明显提高。CNTs含量为3%的试样在100 Hz时,9、81、729层试样的介电常数比1层试样的介电常数依次提高了25.4%、63.4%、135.2%。分析表明:这归结于微纳层叠挤出过程中的剪切及拉伸作用使CNTs在HIPS基体中发生取向,且随着层数的增加,取向效果越明显,碳纳米管的取向造成导电网络被破坏,导致交流电导率轻微下降,但可形成更多的微电容结构,提高了复合材料的介电常数。 展开更多
关键词 微纳层叠 碳纳米管 高抗冲聚苯乙烯 取向 介电性能 导电性能
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I-V and C-V properties of TiO_2 thin film by pulsed-laser reactive deposition 被引量:2
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作者 FU Zhengwen 1, ZHOU Mingfei 1, ZHANG Shengkun 2,CHEN Lianyao 2 and QIN Qizong 1 1. Laser Chemistry Institute, Fudan University, Shanghai 200433, China 2. Department of Physics, Fudan University, Shanghai 200433, China 《Chinese Science Bulletin》 SCIE CAS 1998年第16期1344-1349,共6页
TiO-2 thin films have bee deposited on p-Si(111) substrates by pulsed-laser ablation of metallic Ti target in the O-3 ambient. The current-voltage and capacitance-voltage of the Al/TiO-2/Si capacitors are measured. Th... TiO-2 thin films have bee deposited on p-Si(111) substrates by pulsed-laser ablation of metallic Ti target in the O-3 ambient. The current-voltage and capacitance-voltage of the Al/TiO-2/Si capacitors are measured. The results show that the dielectric constant of thin film after being annealed at 700℃ is found to be 46, and the border trap density and the interface state density at the TiO-2/p-Si interface are 1.8×10 12 cm -2 and 2×10 12 eV -1·cm -2, respectively. The conduction mechanisms of as-deposited films are also discussed. 展开更多
关键词 TiO-2 dielectric properties electrical properties PULSED-LASER deposition.
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Temperature dependent conductivity of Bi_4Ti_3O_(12) ceramics induced by Sr dopants 被引量:4
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作者 Lin WANG Mengqi GUI +4 位作者 Hai-Bo JIN Xinyuan HU Yongjie ZHAO Naseer Muhammad ADNAN Jing-Bo LI 《Journal of Advanced Ceramics》 SCIE CSCD 2018年第3期256-265,共10页
Bi_4Ti_3O_(12) is an important lead-free ferroelectric material.Doping modification of Bi_4Ti_3O_(12)has attracted great attention to improving its performances.In this work,the effect of Sr dopants on the microstruct... Bi_4Ti_3O_(12) is an important lead-free ferroelectric material.Doping modification of Bi_4Ti_3O_(12)has attracted great attention to improving its performances.In this work,the effect of Sr dopants on the microstructure,dielectric,and conductivity of Bi_4Ti_3O_(12) ceramic was investigated by XRD,SEM,and AC impedance spectroscopy.Substitution of 1 at%Sr for Bi decreased the grain size,suppressed the dielectric dispersion of Bi_4Ti_3O_(12) ceramic at room temperature,and resulted in different effects on the conductivity of grains and grain boundaries.The conductivity of grains in Bi_4Ti_3O_(12) ceramic was increased by the small amount of Sr dopants in the whole experimental temperature range.While the grain boundaries of 1 at%Sr-doped Bi_4Ti_3O_(12) exhibited lower conductivity than pure Bi_4Ti_3O_(12) below~380℃and higher conductivity above~380℃.The experimental phenomena were interpreted in term of compensating defects for Sr dopants. 展开更多
关键词 dielectric IMPEDANCE analysis electrical properties defects AURIVILLIUS COMPOUND
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Effect of rare earth and transition metal La-Mn substitution on electrical properties of co-precipitated M-type Ba-ferrites nanoparticles 被引量:4
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作者 Muhammad Ayub Iftikhar Hussain Gul +1 位作者 Khalid Nawaz Khurram Yaqoob 《Journal of Rare Earths》 SCIE EI CAS CSCD 2019年第2期193-197,共5页
In the current research work Ba_(1-x)La)xMn)yFe_(12-y)O_(19) hexa-ferrite nanoparticles of different compositions were synthesized using chemical co-precipitation technique. The structural properties were explored usi... In the current research work Ba_(1-x)La)xMn)yFe_(12-y)O_(19) hexa-ferrite nanoparticles of different compositions were synthesized using chemical co-precipitation technique. The structural properties were explored using X-ray diffractions(XRD), scanning electron microscopy(SEM) and Fourier transmission infrared spectroscopy(FTIR). XRD indexed pattern confirms the formation of M-type hexagonal phase. The crystallite size of synthesized samples ranges from 13 to 34 ± 2 nm. FTIR peaks observe also confirmed the presence of metaloxygen bond of the desired product. The position of peak at 467 cm^(-1) corresponds to A_2 u vibration for octahedral Fe(4+)-O and peak position E1 u corresponds to vibration of Fe(3+)O4 octahedral bonds. The band v_1 in range(677-559 cm^(-1)) and v_2 in frequency range(356-419 cm^(-1)) are associated to A and B sites.Dielectric properties of all compositions were measured with frequency. The dielectric constant, loss and tangent loss decrease from 26 to 9, 25 to 2 and 0.94 to 0.14, respectively with frequency. DC electrical resistivity is increased with dopant concentration increasing from 2.15 × 10~4 to 1.92 ×10~5 Ω·cm. 展开更多
关键词 CO-PRECIPITATION electrical properties dielectric X-ray diffraction RARE earths
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用于深层充电评估的卫星介质电导率测量技术研究 被引量:5
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作者 王燕 张振龙 +3 位作者 全荣辉 黄建国 李宏伟 韩建伟 《航天器环境工程》 2012年第4期425-429,共5页
准确测量得到卫星介质材料的电导率对于卫星深层充电危害评估具有重要意义。在电荷贮存衰减法的基础上,文章提出了一种获得介质材料暗电导率和辐射诱导电导率的试验测量和数值计算方法,即采用90Sr-90Yβ放射源,在温度为20℃、束流密度为... 准确测量得到卫星介质材料的电导率对于卫星深层充电危害评估具有重要意义。在电荷贮存衰减法的基础上,文章提出了一种获得介质材料暗电导率和辐射诱导电导率的试验测量和数值计算方法,即采用90Sr-90Yβ放射源,在温度为20℃、束流密度为5pA/cm2的条件下对卫星常用的聚酰亚胺材料进行辐照试验,通过测得的材料表面电位随时间的变化曲线,拟合得到材料的暗电导率和辐射诱导电导率。该方法已在某卫星产品的充电评估中得到应用,计算结果与模拟试验结果符合较好。 展开更多
关键词 深层介质充电 暗电导率 辐射诱导电导率 电参数测量
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Relaxor behavior and electrical properties of high dielectric constant materials 被引量:2
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作者 FAN HuiQing KE ShanMing 《Science China(Technological Sciences)》 SCIE EI CAS 2009年第8期2180-2185,共6页
Several typical high dielectric constant materials are reviewed to study the electrical properties and relaxation mechanism. It is found that a Lorenz-type law can be used to describe the dielectric permit- tivity of ... Several typical high dielectric constant materials are reviewed to study the electrical properties and relaxation mechanism. It is found that a Lorenz-type law can be used to describe the dielectric permit- tivity of either the normal ferroelectrics with or without diffuse phase transitions (DPT) or the typical ferroelectric relaxors. The ferroelectric DPT can be well described by just one fitting process using the Lorenz-type law, while the relaxor ferroelectric transition needs two independent fitting processes. The Lorenz-type law fails at the low temperature side of the dielectric maximum of a first-order ferroelectric phase transition. Above the transition temperature, the dielectric curves of all the studied materials can be well described by a Lorenz-type law. 展开更多
关键词 electrical properties dielectric RELAXATION high dielectric CONSTANT MATERIALS
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Improvement of sintering,nonlinear electrical,and dielectric properties of ZnO-based varistors doped with TiO2 被引量:1
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作者 Osama A Desouky K E Rady 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第6期575-580,共6页
The effects of TiO2 on sintering and nonlinear electrical properties of(98.5-x)ZnO–0.5MnO2–0.5Co2O3-0.5Bi2O3–xTiO2(x = 0.3,0.5,0.7,0.9 mol%) ceramic varistors prepared by the ceramic technique are investigated ... The effects of TiO2 on sintering and nonlinear electrical properties of(98.5-x)ZnO–0.5MnO2–0.5Co2O3-0.5Bi2O3–xTiO2(x = 0.3,0.5,0.7,0.9 mol%) ceramic varistors prepared by the ceramic technique are investigated in this work.The optimum sintering temperature of the prepared samples is deduced by determining the firing shrinkage and water absorption percentages.The optimum sintering temperature is found to be 1200℃,at which each of the samples shows a maximum firing shrinkage and minimum water absorption.Also minimum water absorption appears in a sample of x = 0.9 mol%.Higher sintering temperature and longer sintering time give rise to a reduction in bulk density due to the increased amount of porosity between the large grains of ZnO resulting from the rapid grain growth induced by the liquid phase sintering.The crystal size of ZnO decreases with increasing TiO2 doping.The addition of TiO2 improves the nonlinear coefficient and attains its maximum value at x = 0.7 mol% of TiO2,further addition negatively affects it.A decrease in capacitance consequently in the dielectric constant is recorded with increasing the frequency in a range of 30 kHz–200 kHz.The temperature and composition dependences of the dielectric constant and AC conductivity are also studied.The increase of temperature raises the dielectric constant because it increases ionic response to the field at any particular frequency. 展开更多
关键词 ZnO varistors water absorption nonlinear electrical properties dielectric constant
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Enhancement of Human Blood Storage Period by Irradiation of Low Level He-Ne Laser 被引量:1
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作者 Samira M. Sallam Abdelsattar M. Sallam +2 位作者 El-Sayed M. El-Sayed L. I. Abo Salem Mona M. Rizk 《Journal of Biophysical Chemistry》 2015年第3期77-86,共10页
The aim of the present work is to investigate the effect of the He-Ne laser irradiation on the whole human blood (HB) in order to enhance the conditions of conservation. The HB was irradiated by He-Ne laser;(λ = 632 ... The aim of the present work is to investigate the effect of the He-Ne laser irradiation on the whole human blood (HB) in order to enhance the conditions of conservation. The HB was irradiated by He-Ne laser;(λ = 632 nm, continuous wave, power 30 mW, 2 mm diameter beam spot), electrical properties and complete blood count CBC were measured at three doses (0.0287, 0.0563 and 0.198 J/cm3) to the relevant best exposure dose during storage periods 9, 24, 30, 35 & 50 days. The irradiation process with the selected dose was performed by the exposure of the laser beam on the blood sample flow through narrow tube of cross section area, 0.0831 cm2. Blood dielectric parameters, (electric conductivity, dielectric constant, dielectric loss and dipole moment) and CBC, (red blood cell, white blood cell, hematocrit, hemoglobin, mean corpuscular volume, mean corpuscular hemoglobin, and mean cell or corpuscular hemoglobin in concentration) were measured. The obtained results were compared with that of the control and showed that the best irradiation exposure dose suitable for increasing the time of blood storage with minimum changes in properties is 0.198 J/cm3 and storage period of about 50 days. The present study revealed that irradiation by He-Ne laser could be considered a good means to improve the conservation conditions of human blood. 展开更多
关键词 HE-NE Laser WHOLE BLOOD Storage electrical properties dielectric CONSTANT
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Direct and Alternate Current Conductivity and Magnetoconductivity of Nanocrystalline Cadmium-Zinc Ferrite below Room Temperature
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作者 Somenath Ghatak Goutam Chakraborty +2 位作者 Monika Sinha Swapan Kumar Pradhan Ajit Kumar Meikap 《Materials Sciences and Applications》 2011年第4期226-236,共11页
Nanocrystalline cadmium-zinc ferrite samples were prepared by ball milling method and its electrical transport property were investigated within a temperature range 77 K ≤ T ≤ 300 K in presence of a magnetic field u... Nanocrystalline cadmium-zinc ferrite samples were prepared by ball milling method and its electrical transport property were investigated within a temperature range 77 K ≤ T ≤ 300 K in presence of a magnetic field up to 1T and in a frequency range 20 Hz to 1 MHz. The investigated samples follow a simple hopping type charge transport. The dc magnetoconductivity has been explained in terms of orbital magnetoconductivity theory. The alternating current conductivity follows the universal dielectric response σ'/(f) ∝ Tnfs. The values of ‘s’ have a decreasing trend with temperature. The temperature exponent ‘n’ depends on frequency. The dielectric permittivity of the samples depends on the grain resistance and interfacial grain boundary resistance. The ac magnetoconductivity is positive which can be explained in terms of impedance of the sample. 展开更多
关键词 Nanostructures X-ray Diffraction electrical properties dielectric properties
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CVD在介电材料表面直接制备石墨烯进展 被引量:2
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作者 李伟 刘林涛 +3 位作者 李争显 王彦峰 刘家欢 李龙博 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2020年第11期3987-3997,共11页
石墨烯是一种SP2碳杂化的二维平面材料,因其卓越的电学、机械、光学性能,在半导体、电子、光学、传感器等多领域具有巨大的应用潜力。虽然石墨烯可以通过直接从母材剥离或过渡金属上生长来制备,但不受控制的生产或额外的复杂转移过程对... 石墨烯是一种SP2碳杂化的二维平面材料,因其卓越的电学、机械、光学性能,在半导体、电子、光学、传感器等多领域具有巨大的应用潜力。虽然石墨烯可以通过直接从母材剥离或过渡金属上生长来制备,但不受控制的生产或额外的复杂转移过程对石墨烯膜层造成一定损伤,而在介电衬底上通过CVD法直接制备石墨烯成为一个有意义的研究方向。本文综述了国内外介电材料表面CVD法直接制备石墨烯研究进展,系统的介绍了介电材料表面直接制备石墨烯的主要方法,阐明生长过程中催化条件、生长参数是介电材料表面制备石墨烯的关键。此外,由于介电材料表面的弱催化作用,其表面直接制备石墨烯晶畴尺寸小,电性能较差,因此实现介电材料表面石墨烯高质量、可控制备是今后研究的方向。 展开更多
关键词 石墨烯 介电材料 无金属催化 电性能
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碱性抛光液在CMP过程中对低k介质的影响 被引量:2
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作者 王立冉 邢哲 +2 位作者 刘玉岭 胡轶 刘效岩 《半导体技术》 CAS CSCD 北大核心 2012年第1期29-32,共4页
以p型<111>硅片为衬底,经过旋涂固化制备低介电常数(低k)材料聚酰亚胺。经过化学机械抛光(CMP)过程,考察实验前后低k材料介电性能的变化。实验中分别使用阻挡层抛光液、Cu抛光液以及新型抛光液对低k材料进行抛光后,利用电参数仪对... 以p型<111>硅片为衬底,经过旋涂固化制备低介电常数(低k)材料聚酰亚胺。经过化学机械抛光(CMP)过程,考察实验前后低k材料介电性能的变化。实验中分别使用阻挡层抛光液、Cu抛光液以及新型抛光液对低k材料进行抛光后,利用电参数仪对低k材料进行电性能测试。结果显示,低k材料介电常数经pH值为7.09新型抛光液抛光后,k值由2.8变为2.895,漏电流在3.35 pA以下,去除速率为59 nm/min。经新型抛光液抛光后的低k材料,在电学性能等方面均优于阻挡层抛光液和Cu抛光液,抛光后的低k材料的性能能够满足应用要求。 展开更多
关键词 低K材料 化学机械抛光 抛光液 介质电特性 聚酰亚胺
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Li_(2) CO_(3)掺杂BST的制备及复合薄片的能量收集研究
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作者 闫东献 刘军 +2 位作者 傅志鹏 乔文豪 骆英 《电子元件与材料》 CAS 北大核心 2023年第12期1403-1410,共8页
将水基流延技术与低温烧结陶瓷技术相结合,用于BST挠曲电陶瓷的研制和能量的收集。为了降低BST的烧结温度,在BST水基流延浆料中添加了质量分数1%~4%的Li_(2) CO_(3),将浆料流延成薄片后进行烧结。研究了Li_(2) CO_(3)掺杂量对烧结温度... 将水基流延技术与低温烧结陶瓷技术相结合,用于BST挠曲电陶瓷的研制和能量的收集。为了降低BST的烧结温度,在BST水基流延浆料中添加了质量分数1%~4%的Li_(2) CO_(3),将浆料流延成薄片后进行烧结。研究了Li_(2) CO_(3)掺杂量对烧结温度的影响以及BST薄片厚度对材料电性能的影响。实验结果表明,适量的Li_(2) CO_(3)掺杂能够将BST的烧结温度降低约250℃。在烧结后的薄片两面涂上银电极和适当厚度的PDMS,得到“三明治结构”的BST复合薄片,用于介电、挠曲电测试和能量收集实验。当Li_(2) CO_(3)掺杂量为质量分数2%时,300μm厚的BST复合薄片在1100℃烧结后介电性能最优,其介电常数为3200,介质损耗为0.05。而200μm厚的复合薄片表现出最高的横向挠曲电系数,达到0.24μC/m。此外,40μm厚的复合薄片表现出最好的电流输出能力,达到1.2 nA。 展开更多
关键词 掺杂 钛酸锶钡 介电性能 挠曲电性能 能量收集
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变价铈离子对(Li,Ce)改性的铋层状化合物结构和性能的影响
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作者 于海博 方频阳 +3 位作者 尹梦姣 吕啸天 王丹 孙禹翠 《西安工业大学学报》 CAS 2015年第10期825-832,共8页
为了明确变价铈离子对铋层状化合物结构和电学性能的影响机理,采用传统固相工艺制备了不同价态铈离子为原料的(Li,Ce)改性的Sr0.6-x(LiCe)x/2(BiNa)0.2Bi2Nb2O9(SBNBN)陶瓷.实验结果表明:不同价态的铈离子由于实际取代位置的不同,会引... 为了明确变价铈离子对铋层状化合物结构和电学性能的影响机理,采用传统固相工艺制备了不同价态铈离子为原料的(Li,Ce)改性的Sr0.6-x(LiCe)x/2(BiNa)0.2Bi2Nb2O9(SBNBN)陶瓷.实验结果表明:不同价态的铈离子由于实际取代位置的不同,会引起材料不同的晶格畸变;不同价态铈离子对SBNBN陶瓷介电性能的影响也不同,Ce3+离子降低了材料的居里温度和高温介电损耗,Ce4+离子则提高了材料的居里温度和高温介电损耗;不同价态铈离子取代均能有效提高(Li,Ce)改性的SBNBN陶瓷的压电性能,Ce3+和Ce4+离子改性的SBNBN陶瓷压电系数的最大值分别达到了28pC·N-1和32pC·N-1. 展开更多
关键词 陶瓷 无机化合物 X射线衍射 介电性能 电学性能
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高k值HfO_2栅介质材料电学特性的研究进展 被引量:9
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作者 田书凤 彭英才 +1 位作者 范志东 张弘 《材料导报》 EI CAS CSCD 北大核心 2007年第1期22-26,共5页
随着Si-MOS集成电路的迅速发展,高k值栅介质材料将成为下一代MOS器件绝缘栅最有希望的候选材料。介绍了近年来HfO2栅介质材料在制备方法和电学特性方面的研究进展,提出了改善其电学特性的主要途径,其中包括非金属元素掺杂、构建组分渐... 随着Si-MOS集成电路的迅速发展,高k值栅介质材料将成为下一代MOS器件绝缘栅最有希望的候选材料。介绍了近年来HfO2栅介质材料在制备方法和电学特性方面的研究进展,提出了改善其电学特性的主要途径,其中包括非金属元素掺杂、构建组分渐变界面、设计准二元合金系统、制备堆垛积层结构、抑制界面层生长和选择适宜的电极材料等。 展开更多
关键词 高介电常数 HFO2栅介质 等效SiO2介电层厚度 电学特性
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建筑用聚吡咯/聚乙烯短丝土工布的介电与导电性能研究 被引量:4
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作者 赵旭君 赵晓明 刘元军 《纺织科学与工程学报》 2022年第3期43-49,共7页
为解决电磁污染对居住环境和军事安全保密性造成的威胁,选用聚乙烯短丝土工布为基材,采用原位聚合法,以吡咯为单体,三氯化铁为氧化剂和掺杂剂制备聚吡咯/聚乙烯短丝土工布。通过扫描电子显微镜对其进行表征,并测试了复合织物的介电常数... 为解决电磁污染对居住环境和军事安全保密性造成的威胁,选用聚乙烯短丝土工布为基材,采用原位聚合法,以吡咯为单体,三氯化铁为氧化剂和掺杂剂制备聚吡咯/聚乙烯短丝土工布。通过扫描电子显微镜对其进行表征,并测试了复合织物的介电常数、损耗角正切、表面电阻和表面电阻率。结果表明:聚吡咯基本覆盖聚乙烯短丝土工布,多为片状结构,局部出现了菜花状聚吡咯的沉积;聚吡咯/聚乙烯短丝土工布介电性能得到改善,具备良好的吸波性能。在50 MHz~300 MHz频段内对电磁波的极化能力随频率增加而减小;在168.04 MHz频率附近,复合织物对电磁波的损耗能力最小,对电磁波的衰减能力最大;复合织物的表面电阻降为23.60Ω/cm,表面电阻率为12.48Ω/Sq,导电性能良好。 展开更多
关键词 聚吡咯 聚乙烯短丝土工布 原位聚合 介电性能 导电性能
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高介电常数La_(2)O_(3)材料的制备方法及其介电性能研究进展
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作者 魏小茹 陈文杰 +1 位作者 王锋 朱胜利 《化工新型材料》 CAS CSCD 北大核心 2024年第6期33-37,共5页
在众多高介电常数栅介质材料中氧化镧(La_(2)O_(3))因带隙大、热稳定性良好等特点而具有代替传统SiO_(2)栅介质材料的潜力。介绍了La_(2)O_(3)薄膜的制备方法,综述了目前改善La_(2)O_(3)薄膜介电性能的方法并展望了其未来发展前景。
关键词 高介电常数介质材料 La_(2)O_(3) 电学特性 制备方法
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纯环氧VPI浸渍树脂的研制及性能测试 被引量:2
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作者 郭胜智 吴梦艳 +3 位作者 徐雄鹰 刘艳婷 施德俊 夏宇 《电机与控制应用》 北大核心 2014年第11期45-48,共4页
介绍了一种无酸酐无易挥发性稀释剂的纯环氧VPI浸渍树脂。通过优选环氧活性稀释剂及自制固化剂,制备一种黏度适中、不易吸潮、储存稳定,且具有优异的电气性能和机械性能的纯环氧VPI浸渍树脂。该树脂性能与环氧酸酐树脂性能相当,是环氧酸... 介绍了一种无酸酐无易挥发性稀释剂的纯环氧VPI浸渍树脂。通过优选环氧活性稀释剂及自制固化剂,制备一种黏度适中、不易吸潮、储存稳定,且具有优异的电气性能和机械性能的纯环氧VPI浸渍树脂。该树脂性能与环氧酸酐树脂性能相当,是环氧酸酐VPI浸渍树脂理想的替代品。 展开更多
关键词 纯环氧VPI浸渍树脂 无酸酐 低介质损耗因数 高电气性能
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Equivalent oxide thickness scaling of Al_2O_3/Ge metal-oxide-semiconductor capacitors with ozone post oxidation 被引量:1
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作者 孙家宝 杨周伟 +6 位作者 耿阳 卢红亮 吴汪然 叶向东 张卫 施毅 赵毅 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第6期561-564,共4页
Aluminum-oxide films deposited as gate dielectrics on germanium (Ge) by atomic layer deposition were post oxidized in an ozone atmosphere. No additional interfacial layer was electron microscopy and X-ray photoelect... Aluminum-oxide films deposited as gate dielectrics on germanium (Ge) by atomic layer deposition were post oxidized in an ozone atmosphere. No additional interfacial layer was electron microscopy and X-ray photoelectron spectroscopy detected by the high-resolution cross-sectional transmission measurements made after the ozone post oxidation (OPO) treatment. Decreases in the equivalent oxide thickness of the OPO-treated Al2O3/Ge MOS capacitors were confirmed. Furthermore, a continuous decrease in the gate leakage current was achieved with increasing OPO treatment time. The results can be attributed to the film quality having been improved by the OPO treatment. 展开更多
关键词 Al2O3 gate dielectric ozone post oxidation equivalent oxide thickness electrical properties
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高k材料Ta2O5结构与电学性质的研究 被引量:1
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作者 陈息林 余涛 +2 位作者 吴雪梅 董尧君 诸葛兰剑 《功能材料》 EI CAS CSCD 北大核心 2011年第7期1335-1338,1341,共5页
利用双离子束沉积设备在p-Si(100)衬底上制备了Ta2O5基MOS电容,研究了不同辅源能量0、100、200、300eV下薄膜生长机制、内部结构以及电学性质的差异。实验结果显示,在辅源能量200eV下制备的Ta2O5薄膜具有最小的表面粗糙度和优异的界面... 利用双离子束沉积设备在p-Si(100)衬底上制备了Ta2O5基MOS电容,研究了不同辅源能量0、100、200、300eV下薄膜生长机制、内部结构以及电学性质的差异。实验结果显示,在辅源能量200eV下制备的Ta2O5薄膜具有最小的表面粗糙度和优异的界面特性。由C-V/I-V特征曲线表明,辅源能量200eV下制备的Ta2O5基MOS电容具有最小的平带电压偏移量、氧化层电荷密度以及漏电流。研究表明合适的辅源能量可有效改善薄膜生长机制,使薄膜由类岛状沉积转化为层状生长,从而提高晶粒均匀性、薄膜平整度以及致密性,使薄膜具有较好的电学性质。 展开更多
关键词 高K栅介质 TA2O5 MOSFET器件 微结构 电学性质
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