We have developed the original design of the planar magnetron sputtering devices, where a turbulent flow of cooling liquid is created in the cathode assembly to rotate the cathode block. Under pressure on the blade of...We have developed the original design of the planar magnetron sputtering devices, where a turbulent flow of cooling liquid is created in the cathode assembly to rotate the cathode block. Under pressure on the blade of the magnetic system holder, the flow of liquid causes to rotate the entire magnetic assembly. Rotation of the magnetic system under the sputtered circular target cathode ensures synchronous movement of the closed magnetic field along its surface. The configuration of the magnetic system, calculated by the mathematical method, taking into account the magnetic field closedness, makes it possible to obtain, on the maximum possible target area, a magnetic field vector parallel to its surface and, therefore, a maximum uniform area of erosion. The intensity of ion bombardment on the surface of the target ＂undulates＂, embracing all its new non-dispersed areas, and they alternately undergo intensive sputtering. Herewith a new physical mechanism of magnetron sputtering of the target surface is realized, which has a significant effect on the stability of technological processes and the physical characteristics of the resulting films. In addition, by adjusting the distance between the opposite poles of the permanent magnet arrays, it is possible to change the configuration of the magnetic field on the target surface. This makes it possible to regulate the distribution of the intensity of ion bombardment on the target surface, which, in one＇s turn, together with the regulation of the rotation rate of the magnetic system, opens new possibilities for controlling the technological modes of atomization.展开更多
为研究SF_6断路器在开断过程的触头烧蚀特性,对被试断路器进行了开断30 k A短路电流的烧蚀试验,通过动态电阻测量得到了触头在不同烧蚀程度下的动态电阻–行程曲线,并从曲线中提取了触头状态参数。根据这些参数在触头电寿命过程的变化规...为研究SF_6断路器在开断过程的触头烧蚀特性,对被试断路器进行了开断30 k A短路电流的烧蚀试验,通过动态电阻测量得到了触头在不同烧蚀程度下的动态电阻–行程曲线,并从曲线中提取了触头状态参数。根据这些参数在触头电寿命过程的变化规律,可以得到：1）动静触头运动存在最小有效接触行程,即14.2 mm;2）触头电阻值存在正常范围,主触头为50-150mW,弧触头为200-400mW;3）每次烧蚀试验中触头烧蚀量不变,为0.318 mm。根据以上结果,分析了断路器在开断电流过程中触头材料损失过程及其对断路器性能的影响,并计算出每次烧蚀试验中触头烧蚀量为0.268 mm,与测量值0.318 mm数量相当,最后初步得出了SF_6断路器触头电寿命的预测方法。展开更多
为弥补传统型式试验项目对断路器弧触头状态检测的缺失,文中提出了一种利用动静触头之间动态电阻曲线诊断弧触头状态的方法。试验通过断路器合成试验回路电流源部分对某试品断路器进行了从开断额定短路电流(有效值40 k A)零次到额定次数...为弥补传统型式试验项目对断路器弧触头状态检测的缺失,文中提出了一种利用动静触头之间动态电阻曲线诊断弧触头状态的方法。试验通过断路器合成试验回路电流源部分对某试品断路器进行了从开断额定短路电流(有效值40 k A)零次到额定次数(22次)的烧蚀老化试验,每次烧蚀后测量其弧触头动态电阻曲线,并将与零烧损状态的曲线之间的相关系数作为弧触头烧损状态诊断的特征参数,从测试结果中发现在断路器第15次开断之后相关系数开始出现明显的变化,该现象表明弧触头寿命已经接近工作极限。试验结果证明,动态电阻曲线能够很好地反映出弧触头的烧损情况,是一种有效的SF6断路器弧触头状态诊断方法。展开更多
文摘We have developed the original design of the planar magnetron sputtering devices, where a turbulent flow of cooling liquid is created in the cathode assembly to rotate the cathode block. Under pressure on the blade of the magnetic system holder, the flow of liquid causes to rotate the entire magnetic assembly. Rotation of the magnetic system under the sputtered circular target cathode ensures synchronous movement of the closed magnetic field along its surface. The configuration of the magnetic system, calculated by the mathematical method, taking into account the magnetic field closedness, makes it possible to obtain, on the maximum possible target area, a magnetic field vector parallel to its surface and, therefore, a maximum uniform area of erosion. The intensity of ion bombardment on the surface of the target ＂undulates＂, embracing all its new non-dispersed areas, and they alternately undergo intensive sputtering. Herewith a new physical mechanism of magnetron sputtering of the target surface is realized, which has a significant effect on the stability of technological processes and the physical characteristics of the resulting films. In addition, by adjusting the distance between the opposite poles of the permanent magnet arrays, it is possible to change the configuration of the magnetic field on the target surface. This makes it possible to regulate the distribution of the intensity of ion bombardment on the target surface, which, in one＇s turn, together with the regulation of the rotation rate of the magnetic system, opens new possibilities for controlling the technological modes of atomization.
文摘为弥补传统型式试验项目对断路器弧触头状态检测的缺失,文中提出了一种利用动静触头之间动态电阻曲线诊断弧触头状态的方法。试验通过断路器合成试验回路电流源部分对某试品断路器进行了从开断额定短路电流(有效值40 k A)零次到额定次数(22次)的烧蚀老化试验,每次烧蚀后测量其弧触头动态电阻曲线,并将与零烧损状态的曲线之间的相关系数作为弧触头烧损状态诊断的特征参数,从测试结果中发现在断路器第15次开断之后相关系数开始出现明显的变化,该现象表明弧触头寿命已经接近工作极限。试验结果证明,动态电阻曲线能够很好地反映出弧触头的烧损情况,是一种有效的SF6断路器弧触头状态诊断方法。
