Amorphous-layer-free nanocrystalline silicon films were prepared by a very high frequency plasma enhanced chem-ical vapor deposition （PECVD） technique using hydrogen-diluted Sill4 at 250 ℃. The dependence of the cr...Amorphous-layer-free nanocrystalline silicon films were prepared by a very high frequency plasma enhanced chem-ical vapor deposition （PECVD） technique using hydrogen-diluted Sill4 at 250 ℃. The dependence of the crystallinity of the film on the hydrogen dilution ratio and the film thickness was investigated. Raman spectra show that the thickness of the initial amorphous incubation layer on silicon oxide gradually decreases with increasing hydrogen dilution ratio. High-resolution transmission electron microscopy reveals that the initial amorphous incubation layer can be completely eliminated at a hydrogen dilution ratio of 98%, which is lower than that needed for the growth of amorphous-layer-free nanocrystalline silicon using an excitation frequency of 13.56 MHz. More studies on the microstructure evolution of the initial amorphous incubation layer with hydrogen dilution ratios were performed using Fourier-transform infrared spectroscopy. It is suggested that the high hydrogen dilution, as well as the higher plasma excitation frequency, plays an important role in the formation of amorphous-layer-free nanocrystalline silicon films.展开更多
Monolayer transition metal dichalcogenides （TMDCs）, as direct bandgap semiconductors, show promise for applications in ultra-thin flexible optoelec- tronic devices. However, the optical properties and device perform...Monolayer transition metal dichalcogenides （TMDCs）, as direct bandgap semiconductors, show promise for applications in ultra-thin flexible optoelec- tronic devices. However, the optical properties and device performance are greatly affected by defects, such as vacancies, present in these materials. Vacancies exist unavoidably in mechanically exfoliated or grown by chemical vapor deposition （CVD） monolayer TMDCs; therefore, their influence on the electric and optical properties of host materials has been widely studied. Here, we report a new defect state located at 1.54 eV, which is 70 meV lower than the neutral exciton energy in as-prepared WSe2 monolayers grown by CVD. This defect state is clearly observed in photoluminescence （PL） and Raman spectra at ambient conditions. PL mapping, Rarnan mapping, and atomic force microscopy analysis indicate a solid-vapor reaction growth mechanism of the defect state formation. During a certain growth stage, nuclei with the composition of WOxSey do not fully react with the Se vapor, leading to the defect formation. This type of defects permits radiative recombination of bound neutral excitons, which can make the PL intensity as strong as the intrinsic excitation. Our findings reveal a new way to tailor the optical properties of two-dimensional TMDCs without any additional processes performed after growth.展开更多
Polycrystalline diamond（PCD） films 100 mm in diameter are grown by 915 MHz microwave plasma chemical vapor deposition（MPCVD） at different process parameters,and their thermal conductivity（TC） is evaluated by a l...Polycrystalline diamond（PCD） films 100 mm in diameter are grown by 915 MHz microwave plasma chemical vapor deposition（MPCVD） at different process parameters,and their thermal conductivity（TC） is evaluated by a laser flash technique（LFT） in the temperature range of230-380 K.The phase purity and quality of the films are assessed by micro-Raman spectroscopy based on the diamond Raman peak width and the amorphous carbon（a-C） presence in the spectra.Decreasing and increasing dependencies for TC with temperature are found for high and low quality samples,respectively.TC,as high as 1950 ± 230 W m-1 K-1 at room temperature,is measured for the most perfect material.A linear correlation between the TC at room temperature and the fraction of the diamond component in the Raman spectrum for the films is established.展开更多
The metal-organic chemical vapor deposition （MOCVD） technique is a promising process for high-tem- perature superconductor YBa2Cu307_6（YBCO） preparation. In this technique, it is a challenge to obtain barium precu...The metal-organic chemical vapor deposition （MOCVD） technique is a promising process for high-tem- perature superconductor YBa2Cu307_6（YBCO） preparation. In this technique, it is a challenge to obtain barium precursors with high volatility. In addition, the purity, evaporation characteristics, and thermostability of adopted precursors in whole process will decide the quality and reproducible results of YBCO film. In the present report, bis（2,2,6,6-tetramethyl- 3,5-heptanedionato）barium（II） （Ba（TMHD）2） was synthe- sized, and its structure was identified by PTIR, 1H NMR, 13C NMR, and ESI-MS spectroscopy. Subsequently, the thermal properties and the kinetics of decomposition were systemati- cally investigated by nonisothermal thermogravimetric anal- ysis methods. Based on the average apparent activation energy evaluated by the Ozawa, Kissinger, and Friedman methods, the volatilization process was discussed, and all results show that Ba（TMHD）2 is unstable and highly sensitive to the change of temperature during the whole evaporation process. There- fore, it is very important to choose suitable volatilization technology and conditions for avoiding Ba（TMHD）2 break- down （or thermal aging） during MOCVD process. Subse- quently, the possible conversion function is estimated through the Coats-Redfern method to characterize the evaporation patterns and follows a phase boundary reaction mechanism by the contracting surface equation with average activation energy of 118.7 kJ.mo1-1.展开更多
The structural and magnetic properties, as well as the mechanism of magnetization, of Ni-implanted A1N films were studied. A1N was deposited on A1203 substrates by metalorganic chemical vapor deposition （MOCVD）, and...The structural and magnetic properties, as well as the mechanism of magnetization, of Ni-implanted A1N films were studied. A1N was deposited on A1203 substrates by metalorganic chemical vapor deposition （MOCVD）, and subsequently Ni ions were implanted into the A1N films by Metal Vapor Arc （MEVVA） sources at an energy of 100 keV for 3 h. The films were annealed at 900~C for 1 h in the furnace in order to transfer the Ni ions from interstitial sites to substitutional sites in A1N, thus activating the Ni3＋ ions. Characterizations were performed in situ using X-ray diffraction （XRD）, X-ray photoemis- sion spectroscopy （XPS）, and vibrating sample magneto- metry （VSM）, which showed that the films have a wurtzite structure without the formation of a secondary phase after implanting and annealing. Ni ions were successfully implanted into substitutional sites of AlN films, and the chemical bonding states are Ni-N. The apparent hysteresis loops prove that the films exhibited magnetism at 300 K. The room temperature （RT） saturation magnetization moment （Ms） and eoercivity （He） values were about 0.36 emu/g and 35.29 Oe, respectively. From the first-principles calculation, a total magnetic moment of 2.99 ~tB per supercell is expected, and the local magnetic moment of a NiN4 tetrahedron, 2.45 gB, makes the primary contribu- tion. The doped Ni atom hybridizes with four nearby N atoms in a NiN4 tetrahedron; then the electrons of the N atoms are spin-polarized and couple with the electrons of the Ni atom with strong magnetization, which results in magnetism. Therefore, the p-d exchange mechanism between Ni-3d and N-2p can be the origin of the magnetism. It is expected that these room temperature, ferromagnetic, Ni-doped A1N films will have many potential applications as diluted magnetic semiconductors.展开更多
Abstract The gas phase nucleation process of anatase TiO2 in atmospheric non-thermal plasma enhanced chemical vapor deposition is studied. The particles synthesized in the plasma gas phase at different power density w...Abstract The gas phase nucleation process of anatase TiO2 in atmospheric non-thermal plasma enhanced chemical vapor deposition is studied. The particles synthesized in the plasma gas phase at different power density were collected outside of the reactor. The structure of the collected particles has been investigated by field scanning electron microscope （FESEM）, X-ray diffraction （XRD）, high resolution transmission electron microscopy （HRTEM） and selected area electron diffraction （SAED）. The analysis shows that uniform crystalline nuclei with average size of several nanometers have been formed in the scale of micro second through this reactive atmo- spheric plasma gas process. The crystallinity of the nanoparticles increases with power density. The high density of crystalline nanonuclei in the plasma gas phase and the low gas temperature are beneficial to the fast deposition of the 3D porous anatase TiO2 film.展开更多
基金Project supported by the National Natural Science Foundation of China (Grant No. 60806046)the Natural Science Foundation of Guangdong Province of China (Grant No. S2011010001853)the FDYT (Grant No. LYM10099)
文摘Amorphous-layer-free nanocrystalline silicon films were prepared by a very high frequency plasma enhanced chem-ical vapor deposition （PECVD） technique using hydrogen-diluted Sill4 at 250 ℃. The dependence of the crystallinity of the film on the hydrogen dilution ratio and the film thickness was investigated. Raman spectra show that the thickness of the initial amorphous incubation layer on silicon oxide gradually decreases with increasing hydrogen dilution ratio. High-resolution transmission electron microscopy reveals that the initial amorphous incubation layer can be completely eliminated at a hydrogen dilution ratio of 98%, which is lower than that needed for the growth of amorphous-layer-free nanocrystalline silicon using an excitation frequency of 13.56 MHz. More studies on the microstructure evolution of the initial amorphous incubation layer with hydrogen dilution ratios were performed using Fourier-transform infrared spectroscopy. It is suggested that the high hydrogen dilution, as well as the higher plasma excitation frequency, plays an important role in the formation of amorphous-layer-free nanocrystalline silicon films.
基金This research was financiaUy supported by the National Natural Science Foundation of China （No. 11304060） and the Foundation of Harbin Institute of Technology for the Incubation Program of the Development of Basic Research Outstanding Talents （No. 01509321）.
文摘Monolayer transition metal dichalcogenides （TMDCs）, as direct bandgap semiconductors, show promise for applications in ultra-thin flexible optoelec- tronic devices. However, the optical properties and device performance are greatly affected by defects, such as vacancies, present in these materials. Vacancies exist unavoidably in mechanically exfoliated or grown by chemical vapor deposition （CVD） monolayer TMDCs; therefore, their influence on the electric and optical properties of host materials has been widely studied. Here, we report a new defect state located at 1.54 eV, which is 70 meV lower than the neutral exciton energy in as-prepared WSe2 monolayers grown by CVD. This defect state is clearly observed in photoluminescence （PL） and Raman spectra at ambient conditions. PL mapping, Rarnan mapping, and atomic force microscopy analysis indicate a solid-vapor reaction growth mechanism of the defect state formation. During a certain growth stage, nuclei with the composition of WOxSey do not fully react with the Se vapor, leading to the defect formation. This type of defects permits radiative recombination of bound neutral excitons, which can make the PL intensity as strong as the intrinsic excitation. Our findings reveal a new way to tailor the optical properties of two-dimensional TMDCs without any additional processes performed after growth.
基金supported by the Russian Ministry of Education and Science(RMES),Agreement No.14.613.21.0021,unique ID No.RFMEFI61314X0021the Department ofScience & Technology(DST),India,grant No.GAP0246 under the joint RMES-DST Research Collaboration Agreement 'Development of large size polycrystalline CVD diamond material for optical windows and support rods in high power microwave tubes'
文摘Polycrystalline diamond（PCD） films 100 mm in diameter are grown by 915 MHz microwave plasma chemical vapor deposition（MPCVD） at different process parameters,and their thermal conductivity（TC） is evaluated by a laser flash technique（LFT） in the temperature range of230-380 K.The phase purity and quality of the films are assessed by micro-Raman spectroscopy based on the diamond Raman peak width and the amorphous carbon（a-C） presence in the spectra.Decreasing and increasing dependencies for TC with temperature are found for high and low quality samples,respectively.TC,as high as 1950 ± 230 W m-1 K-1 at room temperature,is measured for the most perfect material.A linear correlation between the TC at room temperature and the fraction of the diamond component in the Raman spectrum for the films is established.
基金financially supported by the Major State Basic Research Development Program of China(No.2011CBA00105)the National Natural Science Foundation of China(Nos.51002149 and 21101151)
文摘The metal-organic chemical vapor deposition （MOCVD） technique is a promising process for high-tem- perature superconductor YBa2Cu307_6（YBCO） preparation. In this technique, it is a challenge to obtain barium precursors with high volatility. In addition, the purity, evaporation characteristics, and thermostability of adopted precursors in whole process will decide the quality and reproducible results of YBCO film. In the present report, bis（2,2,6,6-tetramethyl- 3,5-heptanedionato）barium（II） （Ba（TMHD）2） was synthe- sized, and its structure was identified by PTIR, 1H NMR, 13C NMR, and ESI-MS spectroscopy. Subsequently, the thermal properties and the kinetics of decomposition were systemati- cally investigated by nonisothermal thermogravimetric anal- ysis methods. Based on the average apparent activation energy evaluated by the Ozawa, Kissinger, and Friedman methods, the volatilization process was discussed, and all results show that Ba（TMHD）2 is unstable and highly sensitive to the change of temperature during the whole evaporation process. There- fore, it is very important to choose suitable volatilization technology and conditions for avoiding Ba（TMHD）2 break- down （or thermal aging） during MOCVD process. Subse- quently, the possible conversion function is estimated through the Coats-Redfern method to characterize the evaporation patterns and follows a phase boundary reaction mechanism by the contracting surface equation with average activation energy of 118.7 kJ.mo1-1.
文摘The structural and magnetic properties, as well as the mechanism of magnetization, of Ni-implanted A1N films were studied. A1N was deposited on A1203 substrates by metalorganic chemical vapor deposition （MOCVD）, and subsequently Ni ions were implanted into the A1N films by Metal Vapor Arc （MEVVA） sources at an energy of 100 keV for 3 h. The films were annealed at 900~C for 1 h in the furnace in order to transfer the Ni ions from interstitial sites to substitutional sites in A1N, thus activating the Ni3＋ ions. Characterizations were performed in situ using X-ray diffraction （XRD）, X-ray photoemis- sion spectroscopy （XPS）, and vibrating sample magneto- metry （VSM）, which showed that the films have a wurtzite structure without the formation of a secondary phase after implanting and annealing. Ni ions were successfully implanted into substitutional sites of AlN films, and the chemical bonding states are Ni-N. The apparent hysteresis loops prove that the films exhibited magnetism at 300 K. The room temperature （RT） saturation magnetization moment （Ms） and eoercivity （He） values were about 0.36 emu/g and 35.29 Oe, respectively. From the first-principles calculation, a total magnetic moment of 2.99 ~tB per supercell is expected, and the local magnetic moment of a NiN4 tetrahedron, 2.45 gB, makes the primary contribu- tion. The doped Ni atom hybridizes with four nearby N atoms in a NiN4 tetrahedron; then the electrons of the N atoms are spin-polarized and couple with the electrons of the Ni atom with strong magnetization, which results in magnetism. Therefore, the p-d exchange mechanism between Ni-3d and N-2p can be the origin of the magnetism. It is expected that these room temperature, ferromagnetic, Ni-doped A1N films will have many potential applications as diluted magnetic semiconductors.
基金supported by National Natural Science Foundation of China(Nos.1083500410775031 and 11375042)+1 种基金Shanghai Municipal Committee of Science and Technology of China(10XD1400100)Outstanding Young Investigator Award(No.11005017)
文摘Abstract The gas phase nucleation process of anatase TiO2 in atmospheric non-thermal plasma enhanced chemical vapor deposition is studied. The particles synthesized in the plasma gas phase at different power density were collected outside of the reactor. The structure of the collected particles has been investigated by field scanning electron microscope （FESEM）, X-ray diffraction （XRD）, high resolution transmission electron microscopy （HRTEM） and selected area electron diffraction （SAED）. The analysis shows that uniform crystalline nuclei with average size of several nanometers have been formed in the scale of micro second through this reactive atmo- spheric plasma gas process. The crystallinity of the nanoparticles increases with power density. The high density of crystalline nanonuclei in the plasma gas phase and the low gas temperature are beneficial to the fast deposition of the 3D porous anatase TiO2 film.
