Independent microstructures made of Ni metal were fabricated by fivesequential processes: porous anodic oxide film formation, pore sealing, laser irradiation, Nielectroplating, and removal of the aluminum substrate an...Independent microstructures made of Ni metal were fabricated by fivesequential processes: porous anodic oxide film formation, pore sealing, laser irradiation, Nielectroplating, and removal of the aluminum substrate and anodic oxide films. Aluminum plates androds were anodized in an oxalic acid solution to form porous type anodic oxide films, and thenimmersed in boiling distilled water for pore sealing. The anodized and pore-sealed specimens wereirradiated with a pulsed neodymium-doped yttrium aluminum garnet (Nd-YAG) laser beam in a Ni platingsolution to remove anodic oxide film locally by rotating and moving up I down with anXYZ(theta)-stage. Nickel was deposited at the area where film had been removed by cathodicpolarization in the solution before removing the aluminum substrate and anodic oxide films in NaOHsolutions. Cylindrical or plain network structures were fabricated successfully.展开更多
文摘Independent microstructures made of Ni metal were fabricated by fivesequential processes: porous anodic oxide film formation, pore sealing, laser irradiation, Nielectroplating, and removal of the aluminum substrate and anodic oxide films. Aluminum plates androds were anodized in an oxalic acid solution to form porous type anodic oxide films, and thenimmersed in boiling distilled water for pore sealing. The anodized and pore-sealed specimens wereirradiated with a pulsed neodymium-doped yttrium aluminum garnet (Nd-YAG) laser beam in a Ni platingsolution to remove anodic oxide film locally by rotating and moving up I down with anXYZ(theta)-stage. Nickel was deposited at the area where film had been removed by cathodicpolarization in the solution before removing the aluminum substrate and anodic oxide films in NaOHsolutions. Cylindrical or plain network structures were fabricated successfully.