摘要
采用电化学阳极氧化法制备亚微米氧化铝有序多孔膜 ,研究了铝电极预处理过程、扩孔时间、阳极氧化时间和阳极氧化电压对亚微米氧化铝有序多孔膜孔径、孔密度以及孔排列有序性的影响规律 。
Submicron ordered porous alumina film is prepared with the electrochemically anodization method. The observations show that the diameter of the pores, the density of the pore arrays and the tendency to form regular pore structures strongly depend on the pretreatment of the aluminum substrate, the anodized time and the anodized voltage. The influences of these conditions are investigated. And we built a simple model to discuss the growing process of the film.
出处
《微纳电子技术》
CAS
2003年第7期137-141,共5页
Micronanoelectronic Technology
